Properties of tantalum oxide thin films grown by atomic layer deposition
References (34)
- et al.
Thin Solid Films
(1982) Mater. Chem. Phys.
(1992)- et al.
Thin Solid Films
(1989) - et al.
Thin Solid Films
(1991) - et al.
Thin Solid Films
(1993) - et al.
Thin Solid Films
(1993) - et al.
Appl. Surf. Sci.
(1994) - et al.
J. Cryst. Growth
(1994) - et al.
Appl. Surf. Sci.
(1994) - et al.
Thin Solid Films
(1975)
Appl. Opt.
(1985)
Appl. Opt.
(1993)
Appl. Opt.
(1989)
Appl. Phys. Lett.
(1993)
Jpn. J. Appl. Phys.
(1993)
J. Appl. Phys.
(1993)
Jpn. J. Appl. Phys.
(1990)
Cited by (117)
MOx materials by ALD method
2022, Metal Oxides for Non-volatile Memory: Materials, Technology and ApplicationsA combination strategy of functionalized polymer coating with Ta ion implantation for multifunctional and biodegradable vascular stents
2021, Journal of Magnesium and AlloysAnodic tantalum oxide: synthesis and energy-related applications
2020, Nanostructured Anodic Metal Oxides: Synthesis and ApplicationsTuning the stoichiometry and electrical properties of tantalum oxide thin films
2019, Applied Surface Science
Copyright © 1995 Published by Elsevier B.V.