Abstract
In this paper, the correlation between the electrochromic performance and the surface morphology of the tungsten trioxide (WO3) thin films sputtered by dc reactive magnetron sputtering with widely varying target-substrate distances was investigated. It is found that the optical density change (ΔOD) of films is strongly affected by the target-substrate distance. The coloration efficiency (CE) at 633 nm was also found to be sensitive to the target-substrate distance, with 16 cm2/C of film sputtered at 6 cm and 50 cm2/C at 18 cm. X-ray diffraction showed that the crystal structure of films was amorphous. By using atomic force microscope to identify the surface porosity of the sputtered WO3 films, we found that the film at longer target-substrate distance was rough, porous, and having a cone-shaped columns morphology, thus offering a good electrochromic performance for opto-switching applications.
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J. Arakaki, R. Reyes, M. Horn, and W. Estrada, Solar Energy Materials and Solar Cells 37, 33 (1995).
C.G. Granqvist, Solar Energy Materials and Solar Cells 32, 369 (1994).
Klaus Bange and Thomas Gambke, Advanced Materials 2, 10 (1990).
R.B. Goldner, F.O. Arntz, G. Berera, T.E. Haas, G. Wei, K.K. Wong, and P.C. Yu, Solid State Ionics 53–56, 617 (1992).
R.B. Goldner, J. Vac. Sci. Technol. A13(3), 1088 (1995).
T.C. Arnoldussen, J. Electrochem. Soc. 128, 117 (1981).
I.F. Chang and W.E. Howard, IEEE Trans. Electron Devices ED-22, 749 (1975).
H. Kaneko, K. Miyake, and Y. Teramoto, J. Appl. Phys. 53, 4416 (1982).
M. Nabavi, S. Doeuff, C. Sanchez, and J. Livaze, Mater. Sci. Eng.. B3, 203 (1989).
J.S.E.M. Svensson and C.G. Granqvist, Proc. SPIE 502, 30 (1984).
R.B. Goldner and R.D. Rauh, Proc. SPIE 428, 38 (1983).
R.B. Goldner, T.E. Haas, F.O. Arntz, S. Slaven, K.K. Wong, B. Wilkens, C. Shepard, and W. Lanford, Appl. Phys. Lett. 62, 1699 (1993).
P.V. Ashrit, K. Benaissa, G. Bader, F.E. Girouard, and Vo-Van Truong, Solid State Ionics 59, 47 (1993).
H.S. Witham, P. Chindaudom, I. An, R.W. Collins, R. Messier, and K. Vedam, J. Vac. Sci. Technol. A11, 1881 (1993).
lorganic File, Plate 18–1418 (Mineral Power Diffraction File, 1986).
A.P. Giri and R. Messier, Mater. Res. Soc. Symp. Proc. 24, 221 (1984).
J. Nagai, T. Kamimori, and M. Mizuhashi, Proc. SPIE 502, 59 (1984).
D.K. Benson and C.E. Tracy, Proc. SPIE 562, 46 (1985).
W.C. Dautremount-Smith, Displays 3, 3 (1982); 3, 67 (1982).
S.A. Agnihotri, K.K. Saini, and S. Chandra, Ind. J. Pure Appl. Phys. 24, 19 (1986); 24, 34 (1986).
K. Yamanaka, Jpn. J. Appl. Phys. 25, 1073 (1982).
R.C. Ross, A.G. Johncock, and A.R. Chan, J. Non-Cryst. Solids 66, 81 (1984).
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Lee, W.J., Fang, Y.K., Ho, JJ. et al. Effects of surface porosity on tungsten trioxide(WO3) films’ electrochromic performance. J. Electron. Mater. 29, 183–187 (2000). https://doi.org/10.1007/s11664-000-0139-8
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DOI: https://doi.org/10.1007/s11664-000-0139-8