Skip to main content
Log in

Effects of surface porosity on tungsten trioxide(WO3) films’ electrochromic performance

  • Regular Issue Paper
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

In this paper, the correlation between the electrochromic performance and the surface morphology of the tungsten trioxide (WO3) thin films sputtered by dc reactive magnetron sputtering with widely varying target-substrate distances was investigated. It is found that the optical density change (ΔOD) of films is strongly affected by the target-substrate distance. The coloration efficiency (CE) at 633 nm was also found to be sensitive to the target-substrate distance, with 16 cm2/C of film sputtered at 6 cm and 50 cm2/C at 18 cm. X-ray diffraction showed that the crystal structure of films was amorphous. By using atomic force microscope to identify the surface porosity of the sputtered WO3 films, we found that the film at longer target-substrate distance was rough, porous, and having a cone-shaped columns morphology, thus offering a good electrochromic performance for opto-switching applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. Arakaki, R. Reyes, M. Horn, and W. Estrada, Solar Energy Materials and Solar Cells 37, 33 (1995).

    Article  CAS  Google Scholar 

  2. C.G. Granqvist, Solar Energy Materials and Solar Cells 32, 369 (1994).

    Article  CAS  Google Scholar 

  3. Klaus Bange and Thomas Gambke, Advanced Materials 2, 10 (1990).

    Article  CAS  Google Scholar 

  4. R.B. Goldner, F.O. Arntz, G. Berera, T.E. Haas, G. Wei, K.K. Wong, and P.C. Yu, Solid State Ionics 53–56, 617 (1992).

    Article  Google Scholar 

  5. R.B. Goldner, J. Vac. Sci. Technol. A13(3), 1088 (1995).

    Google Scholar 

  6. T.C. Arnoldussen, J. Electrochem. Soc. 128, 117 (1981).

    Article  CAS  Google Scholar 

  7. I.F. Chang and W.E. Howard, IEEE Trans. Electron Devices ED-22, 749 (1975).

    Google Scholar 

  8. H. Kaneko, K. Miyake, and Y. Teramoto, J. Appl. Phys. 53, 4416 (1982).

    Article  CAS  Google Scholar 

  9. M. Nabavi, S. Doeuff, C. Sanchez, and J. Livaze, Mater. Sci. Eng.. B3, 203 (1989).

    Article  CAS  Google Scholar 

  10. J.S.E.M. Svensson and C.G. Granqvist, Proc. SPIE 502, 30 (1984).

    CAS  Google Scholar 

  11. R.B. Goldner and R.D. Rauh, Proc. SPIE 428, 38 (1983).

    CAS  Google Scholar 

  12. R.B. Goldner, T.E. Haas, F.O. Arntz, S. Slaven, K.K. Wong, B. Wilkens, C. Shepard, and W. Lanford, Appl. Phys. Lett. 62, 1699 (1993).

    Article  CAS  Google Scholar 

  13. P.V. Ashrit, K. Benaissa, G. Bader, F.E. Girouard, and Vo-Van Truong, Solid State Ionics 59, 47 (1993).

    Article  CAS  Google Scholar 

  14. H.S. Witham, P. Chindaudom, I. An, R.W. Collins, R. Messier, and K. Vedam, J. Vac. Sci. Technol. A11, 1881 (1993).

    Google Scholar 

  15. lorganic File, Plate 18–1418 (Mineral Power Diffraction File, 1986).

  16. A.P. Giri and R. Messier, Mater. Res. Soc. Symp. Proc. 24, 221 (1984).

    CAS  Google Scholar 

  17. J. Nagai, T. Kamimori, and M. Mizuhashi, Proc. SPIE 502, 59 (1984).

    CAS  Google Scholar 

  18. D.K. Benson and C.E. Tracy, Proc. SPIE 562, 46 (1985).

    CAS  Google Scholar 

  19. W.C. Dautremount-Smith, Displays 3, 3 (1982); 3, 67 (1982).

    Article  Google Scholar 

  20. S.A. Agnihotri, K.K. Saini, and S. Chandra, Ind. J. Pure Appl. Phys. 24, 19 (1986); 24, 34 (1986).

    Google Scholar 

  21. K. Yamanaka, Jpn. J. Appl. Phys. 25, 1073 (1982).

    Article  Google Scholar 

  22. R.C. Ross, A.G. Johncock, and A.R. Chan, J. Non-Cryst. Solids 66, 81 (1984).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, W.J., Fang, Y.K., Ho, JJ. et al. Effects of surface porosity on tungsten trioxide(WO3) films’ electrochromic performance. J. Electron. Mater. 29, 183–187 (2000). https://doi.org/10.1007/s11664-000-0139-8

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-000-0139-8

Key words

Navigation