Abstract
Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equispaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
N. Ishiyama: U.S. Patent 5227607 (1993).
K. Minamida and J. Suehiro: US. Patent 4947023 (1990).
S. Yahagi, S. Ishida and S. Fujimoto: U.S. Patent 5017755 (1991).
J. Amako, M. Murai and T. Sonehara: OSA Technical Digest Series Vol. 11, CTuK6 (Optical Society of America, Washington D.C., 1997) p. 99
M.R. Taghizadeh, J.I.B. Wilson, J. Turunen, A. Vasara and J. Westerholm: Appl. Phys. Lett. 54 (1989) 1492.
J. Jahns, M.M. Downs, M.E. Prise, N. Streibl and S.J. Walker: Opt. Eng. 28 (1989) 1267.
A. Vasara, M.R. Taghizadeh, J. Tutunen, J. Westerholm, E. Noponen, H. Ichikawa, J.M. Miller, T. Jaakkola and S. Kuisma: Appl. Opt. 31 (1992) 3320.
R.L. Morrison: J. Opt. Soc. Am. A 9 (1992) 464.
J. Amako and T. Sonehara: Opt. Rev. 2 (1995) 339
Author information
Authors and Affiliations
Additional information
To whom correspondence should be addressed
Rights and permissions
About this article
Cite this article
Amako, J., Murai, M. & Sonehara, T. Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels. OPT REV 5, 83–88 (1998). https://doi.org/10.1007/s10043-998-0083-z
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s10043-998-0083-z