Regular Paper

A piezoelectric polymer cavitation sensor installed in an emulsion generation microchannel device and an evaluation of cavitation state

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Published 1 June 2016 © 2016 The Japan Society of Applied Physics
, , Citation Takefumi Kanda et al 2016 Jpn. J. Appl. Phys. 55 07KE07 DOI 10.7567/JJAP.55.07KE07

1347-4065/55/7S1/07KE07

Abstract

In previous works, ultrasonic emulsification was realized using small microchannel devices oscillated by piezoelectric transducers. By using the devices, the emulsification in the flow process was also realized. In these devices, the driving frequency was higher than 2 MHz. This value is higher than the maximum audible field. On the other hand, the frequency is too high to utilize the cavitation effect. This is because the cavitation threshold depends on the frequency. The aim of this study is to confirm the cavitation state in the microchannel device using a piezoelectric polymer sensor. A micropatterned cavitation detection sensor has been fabricated by a photolithography technique and evaluated in a high-intensity ultrasound field. The emulsification state in the microchannel device has been evaluated using the fabricated sensor.

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10.7567/JJAP.55.07KE07