Nanogap Resistance Random Access Memory Based on Natural Aluminum Oxide

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Published 21 March 2013 Copyright (c) 2013 The Japan Society of Applied Physics
, , Citation Toru Miyabe and Toshihiro Nakaoka 2013 Jpn. J. Appl. Phys. 52 04CJ08 DOI 10.7567/JJAP.52.04CJ08

1347-4065/52/4S/04CJ08

Abstract

We report unipolar and bipolar resistive switchings in naturally oxidized AlxO1-x thin films. We find a relationship between the switching behavior and the electrode gap distance. The macro-gap device with the electrode separation of 20 µm shows a unipolar switching behavior while the nano-gap device with the separation of 40 nm shows a bipolar behavior. The result is explained by a model in which the unipolar or the bipolar switching is governed by the way of the carrier injection into oxygen vacancies.

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10.7567/JJAP.52.04CJ08