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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Preparation and Characterization of a...

Preparation and Characterization of a Micro-Supercapacitor with Three-Dimensional Microelectrode Arrays

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Abstract:

With the development of the MEMS technology and the more widely-used micro-systems, micro-power devices are developed for portable consumer electronics.^[The MEMS supercapacitor is one of the most important parts for micro-powers. In this paper, a micro-supercapacitor was designed and fabricated with three-dimensional microelectrode arrays configuration. It has been tested by scanning electron microscopy, Cyclic Voltammeter, Galvanostatical charge/discharge curve and electrochemical impedance spectroscopy. These posts were 50 μm in diameter and 100 μm tall; with foot print area of 2×2mm². The capacitance is 89.52mF/cm². The biggest feature in this paper is that the two plates of the supercapacitor are both three-dimensional microelectrode arrays which are shown to offer significant advantages.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

1196-1202

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.1196

Citation:

Cite this paper

Online since:

July 2013

Authors:

Xiang Yu Li, Xiao Feng Wang, Rui Ma, Wu Shuang Lv, Zheng You

Keywords:

3-D Microelectrode Arrays, MEMS, Micro-Power, Ruthenium Oxide (RuO₂)

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