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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 100Fluidic Physical Sensors and Sensor Systems

Fluidic Physical Sensors and Sensor Systems

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Abstract:

Silicon-based MEMS technology has furthered the introduction of sensors and actuators in many applications. Particularly in inertial sensing, where no contact with a medium to be sensed is required, highly reliable and cost-effective solutions have been developed. For application in fluidic environments, special demands regarding the interaction can occur. Also, silicon-based technology is not cost-effective in low-volume applications.In our recent work, we thus consider hybrid technologies and concentrate on physical sensor principles, which often provide more robustness in process control and condition monitoring than dedicated chemical sensors featuring chemical reactions with the environment by means of specific chemical interfaces. The latter are frequently prone to reliability issues, e.g. due to poisoning, drift, etc. Examples for physical parameters are thermal and electrical conductivity, permittivity, viscosity, speed of sound, and density. In this contribution, sensing concepts addressing these target parameters are reviewed.

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Periodical:

Advances in Science and Technology (Volume 100)

Pages:

134-138

DOI:

https://doi.org/10.4028/www.scientific.net/AST.100.134

Citation:

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Online since:

October 2016

Authors:

Bernhard Jakoby*

Keywords:

Fluidic Sensors, Infrared Sensors, Physical Chemosensors, Physical Sensors, Viscosity Sensors

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* - Corresponding Author

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