Abstract
It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.
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Zhu, XY., Jun, Y., Boiadjiev, V. et al. Novel Chemistry for Surface Engineering in Mems. MRS Online Proceedings Library 657, 33 (2000). https://doi.org/10.1557/PROC-657-EE3.3
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DOI: https://doi.org/10.1557/PROC-657-EE3.3