Abstract
In this paper, material properties of low pressure, metallic mode Coherent TiN and poison mode Coherent TiN have been examined. The material properties include resistivity, crystal orientation, stress, lattice spacing, density, texture, atomic composition, bonding, roughness, hydrogen content, and grain size. Various analytical tools have been used to analyze the TiN films.
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Ngan, K. Material Properties of Coherent Tin Films. MRS Online Proceedings Library 391, 217 (1995). https://doi.org/10.1557/PROC-391-217
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DOI: https://doi.org/10.1557/PROC-391-217