Abstract
A new class of water soluble conducting polyanilincs have been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines readily dissolve in water. These materials can be applied as removable discharge layers for electron-beam (e-beam) lithography and for SEM mask metrology. Cross-linkable functionality can be incorporated on the polyanilinc backbone resulting in water soluble polyanilines that are radiation curable. Upon irradiation these materials cross-link and become insoluble and thus can be utilized as permanent conducting coatings for electrostatic discharge (ESD) applications. In addition, the cross-linkable polyanilines can be made into water developable conducting resists. 1.0μm conducting lines have been patterned with e-bcam irradiation.
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Angelopoulos, M., Patel, N. & Shaw, J.M. Water Soluble Poly Anilines: Properties and Applications. MRS Online Proceedings Library 328, 173–178 (1993). https://doi.org/10.1557/PROC-328-173
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DOI: https://doi.org/10.1557/PROC-328-173