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Large Area 2-Dimensional a-Si:H Imaging Arrays

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Abstract

Six inch diagonal, two-dimensional amorphous silicon imaging arrays with 256x240 pixels of 450 micron pitch have been fabricated. Examples of images made under visible light and X-rays illustrate applications to electronic document input and medical imaging. The limits to the array performance are explored through studies of image lag due to deep trapping at dangling bond defects in the a-Si:H sensor, and through measurements of electronic noise.

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Acknowledgement

The authors are grateful to V. Perez-Mendez for supplying the SVX chips, and to L. Antonuk, J. Boudry and G. Cho for discussions of noise. The research is partially supported by the NIH, grant No. 5-RO1-CA51397-03

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Authors and Affiliations

  1. Xerox Palo Alto Research Center, Palo Alto, CA, 94304, USA

    R. A. Street, I. Fujieda, R. Weisfield, S. Nelson & P. Nylen

  2. University of Stockholm, Sweden

    P. Nylen

Authors
  1. R. A. Street
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  2. I. Fujieda
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  3. R. Weisfield
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  4. S. Nelson
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  5. P. Nylen
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Street, R.A., Fujieda, I., Weisfield, R. et al. Large Area 2-Dimensional a-Si:H Imaging Arrays. MRS Online Proceedings Library 258, 1145–1150 (1992). https://doi.org/10.1557/PROC-258-1145

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  • DOI: https://doi.org/10.1557/PROC-258-1145

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