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Nondestructive Measurement of Interphase Processes Using Impedance Spectroscopy

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Abstract

Impedance spectroscopy (IS) was used as a nondestructive technique to measure the interphase processes of encapsulated microelectronic substrates exposed to high relative humidity. The advantages of IS include: sensitivity of IS to chemical kinetics, ability of in-situ testing of encapsulated packages and non-destructive nature.

Samples undergoing contamination under high relative humidity, produce frequency responses resembling those found for electrochemical cells. This suggests that the presence of hygroscopic residues induce surface water uptake resulting in the formation of surface electrochemical cells and decreased interphase impedance.

Samples undergoing a process of “supercleaning” using argon plasma and exposed to high relative humidity, produce frequency responses that more closely approach responses characteristic of dry samples than do conventionally cleaned or contaminated samples.

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Authors and Affiliations

  1. Pritzker Institute of Medical Engineering, Illinois Institute of Technology, Chicago, IL, 60616, USA

    Richard Frankovic & Philip R. Troyk

  2. Research Staff, Ford Motor Company, Dearborn, MI, 48121, USA

    James E. Anderson

Authors
  1. Richard Frankovic
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  2. Philip R. Troyk
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  3. James E. Anderson
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Frankovic, R., Troyk, P.R. & Anderson, J.E. Nondestructive Measurement of Interphase Processes Using Impedance Spectroscopy. MRS Online Proceedings Library 203, 189–199 (1990). https://doi.org/10.1557/PROC-203-189

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