Abstract
The mechanical properties of compositionally modulated Au-Ni films were investigated by submicrometer depth-sensing indentation and by deflection of micrometer-scale cantilever beams. Films prepared by sputter deposition with composition wavelengths between 0.9 and 4.0 nm were investigated. Strength was found to be high and invariant with composition wavelength. Experimental and data analysis methods were developed to provide more accurate and precise measurements of elastic stiffness. Large enhancements in stiffness (the “supermodulus effect”) were not observed. Rather, relatively small but significant minima were observed at a composition wavelength of about 1.6 nm by both techniques. These variations were found to be strongly correlated with variations in the average lattice parameter normal to the plane of the film. Both structural and mechanical property variations are consistent with a simple model in which the film consists of bulk-like Au and Ni layers with interfaces of constant thickness.
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References
J. S. Koehler, Phys. Rev. B 2, 547 (1970).
W. D. Nix, Metall. Trans. A 20A, 2217 (1989).
I. K. Schuller, K. Fartash, and M. Grimsditch, Mater. Res. Bull. XV, 33 (1990).
R. C. Cammarata, T. E. Schlesinger, C. Kim, S. B. Qadri, and A. S. Edelstein, Appl. Phys. Lett. 56, 1862 (1990).
W. M. C. Yang, T. Tsakalakos, and J. E. Hilliard, J. Appl. Phys. 48, 876 (1977).
L. R. Testardi, R. H. Willens, J. T. Krause, D. B. McWhan, and S. Nakahara, J. Appl. Phys. 52, 510 (1981).
G. E. Hénein and J. E. Hilliard, J. Appl. Phys. 54, 728 (1983).
T. Tsakalakos and J. E. Hilliard, J. Appl. Phys. 54, 734 (1983).
D. Baral, J. B. Ketterson, and J. E. Hilliard, J. Appl. Phys. 57, 1076 (1985).
A. Jankowski and T. Tsakalakos, J. Appl. Phys. 57, 1835 (1985).
S. P. Baker, Ph.D. Dissertation, Stanford University (1993).
H. Itozaki, Ph.D. Dissertation, Northwestern University (1982).
A. Kueny, M. Grimsditch, K. Miyano, I. Banerjee, C.M. Falco, and I. K. Schuller, Phys. Rev. Lett. 48, 166 (1982).
R. Danner, R. P. Huebener, C. S. L. Chun, M. Grimsditch, and I. K. Schuller, Phys. Rev. B 33, 3696 (1986).
P. Baumgart, B. Hillebrands, R. Mock, G. Güntherodt, A. Boufelfel, and C. M. Falco, Phys. Rev. B 34, 9004 (1986).
P. Bisanti, M. B. Brodsky, G. P. Felcher, M. Grimsditch, and L. R. Sill, Phys. Rev. B 35, 7813 (1987).
J. R. Dutcher, S. Lee, J. Kim, G. I. Stegeman, and C. M. Falco, Phys. Rev. Lett. 65, 1231 (1990).
B. M. Davis, D. N. Seidman, A. Moreau, J. B. Ketterson, J. Mattson, and M. Grimsditch, Phys. Rev. B 43, 9304 (1991).
A. Fartash, E. E. Fullerton, I. K. Schuller, S. E. Bobbin, J. W. Wagner, R. C. Cammarata, S. Kumar, and M. Grimsditch, Phys. Rev. B 44, 13760 (1991).
G. Carlotti, D. Fioretto, G. Socino, B. Rodmaq, and V. Pelosin, J. Appl. Phys. 71, 4897 (1992).
B. M. Clemens and G. L. Eesley, Phys. Rev. Lett. 61, 2356 (1988).
A. Moreau, J. B. Ketterson, and B. Davis, J. Appl. Phys. 68, 1622 (1990).
G. Richardson, J. L. Makous, H. Y. Yu, and A. S. Edelstein, Phys. Rev. B 45, 12114 (1992).
B. S. Berry and W. C. Pritchet, Thin Solid Films 33, 19 (1976).
H. Awano, O. Taniguchi, T. Katayama, F. Inoue, A. Itoh, and K. Kawanishi, J. Appl. Phys. 64, 6107 (1988).
V. Pelosin, B. Rodmaq, J. Hillairet, G. Carlotti, D. Fioretto, and G. Socino, Mater. Sci. Forum 119–121, 359 (1993).
I. K. Schuller and M. Grimsditch, J. Vac. Sci. Technol. B 4, 1444 (1986).
S. P. Baker and W. D. Nix, J. Mater. Res. 9, 3140 (1994).
A. F. Jankowski, Superlat. Microstruct. 6, 427 (1989).
S. R. Nutt, K. A. Green, S. P. Baker, W. D. Nix, and A. Jankowski, in Thin Films: Stresses and Mechanical Properties, edited by J. C. Bravman, W. D. Nix, D. M. Barnett, and D. A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 129.
S. P. Baker, A. F. Jankowski, S. Hong, and W. D. Nix, in Thin Films: Stresses and Mechanical Properties II, edited by M. F. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 289.
A. F. Jankowski, J. Appl. Phys. 71, 1782 (1992).
M. A. Wall and A. F. Jankowski, Thin Solid Films 181, 313 (1989).
Nano Instruments Inc., “Nanoindenter,” Knoxville, TN.
M. F. Doerner and W. D. Nix, J. Mater. Res. 1, 601 (1986).
W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
D. Lebouvier, P. Gilormini, and E. Felder, J. Phys. D: Appl. Phys. 18, 199 (1985).
T. A. Laursen and J. C. Simo, J. Mater. Res. 7, 618 (1992).
Nano Instruments Inc., “Nanoindenter operation and analysis software,” Knoxville, TN.
J. E. Field, in The Properties of Diamond (Academic Press, London, 1979).
T. P. Weihs, S. Hong, J. C. Bravman, and W. D. Nix, J. Mater. Res. 3, 931 (1988).
S. Hong, T. P. Weihs, J. C. Bravman, and W. D. Nix, in Thin Films: Stresses and Mechanical Properties, edited by J. C. Bravman, W. D. Nix, D. Barnett, and D. A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 93.
G. Simmons and H. Wang, Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook (M. I. T. Press, Cambridge, MA, 1971).
S. Timoshenko and J. N. Goodier, Theory of Elasticity (McGraw-Hill, New York, 1970).
D. Tabor, The Hardness of Metals (Oxford University Press, London, 1951).
C. Feldman, F. Orway, and J. Bernstein, J. Vac. Sci. Technol. A 8, 117 (1990).
R. Venkatraman and J. C. Bravman, J. Mater. Res. 7, 2040 (1992).
J. B. Pethica and W. C. Oliver, in Thin Films: Stresses and Mechanical Properties, edited by J. C. Bravman, W. D. Nix, D. M. Barnett, and D. A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 13.
S. P. Baker, in Thin Films: Stresses and Mechanical Properties IV, edited by P. H. Townsend, T. P. Weihs, J. E. Sanchez, Jr., and P. Børgesen (Mater. Res. Soc. Symp. Proc. 308, Pittsburgh, PA, 1993).
J. J. Vlassak and W. D. Nix, Philos. Mag. A 67, 1045 (1993).
G. Carlotti, D. Fioretto, L. Palmieri, G. Socino, L. Verdini, H. Xia, A. Hu, and X. K. Zhang, Phys. Rev. B 46, 12777 (1992).
H. Xia, X. K. Zhang, A. Hu, S. S. Jiang, R. W. Peng, W. Zhang, D. Feng, G. Carlotti, D. Fioretto, G. Socino, and L. Verdini, Phys. Rev. B 47, 3890 (1993).
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Baker, S.P., Nix, W.D. Mechanical properties of compositionally modulated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments. Journal of Materials Research 9, 3131–3144 (1994). https://doi.org/10.1557/JMR.1994.3131
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DOI: https://doi.org/10.1557/JMR.1994.3131