ABSTRACT

This chapter discusses the issues related to stiction are reviewed with characterization methods of the antistiction layers related to nano- and microimprint. Progress in nanotechnology depends on the ability to fabricate nanostructures in materials with accuracy on a nanometer scale. In order to fabricate nanometer structures, understand the underlying science and engineering on a nanometer scale. The high-energy mold surfaces are in general very vulnerable to stiction if polymer materials contact with molds during the imprinting process. Cross-sectional scanning electron microscopy can directly measure film thickness. However, this method is destructive and time consuming, and it is difficult to prepare the sample. After the deposition of nanometer-thick fluorocarbon films, it is important to measure the polymer film thickness. Antistiction layers, which have a low surface energy composed of amorphous fluorocarbon-polymers, have been shown to provide dramatic improvements in both mold life and mask defect generation in imprinting lithography.