Fast Etching Imperfections in Silicon Dioxide Films

© 1966 ECS - The Electrochemical Society
, , Citation A. D. Lopez 1966 J. Electrochem. Soc. 113 89 DOI 10.1149/1.2423872

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1 Bell Telephone Laboratories, Incorporated, Murray Hill, New Jersey

Dates

  1. Received 24 June 1965
  2. Revised 27 September 1965

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