Development of One Period of a Three-Dimensional Photonic Crystal in the 5–10 µm Wavelength Region by Wafer Fusion and Laser Beam Diffraction Pattern Observation Techniques

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Copyright (c) 1998 The Japan Society of Applied Physics
, , Citation Noritsugu Yamamoto Noritsugu Yamamoto et al 1998 Jpn. J. Appl. Phys. 37 L1052 DOI 10.1143/JJAP.37.L1052

This article is corrected by 1998 Jpn. J. Appl. Phys. 37 L1491

1347-4065/37/9A/L1052

Abstract

One period of a three-dimensional photonic crystal operating in the 5∼10-µm-wavelength region is developed, where four layers having a striped pattern are stacked using a wafer fusion and the alignment method based on a laser beam diffraction pattern observation technique. By measuring the transmission spectrum, considerable attenuation (of about 16 dB) is successfully achieved and is in good agreement with the theoretical calculation.

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10.1143/JJAP.37.L1052