Abstract
It was found that PMMA prepared in the presence of the chain transfer agents dodecyl mercaptan and pentamethyldisilane possess noticeably better properties as a radiation resist relative to the polymer with a close molecular mass obtained in the absence of a transfer agent. By means of densitometry, GPC, calorimetry, small-angle X-ray scattering, and light scattering, it was shown that the existence of weak bonds, the narrowing of the molecular-mass distribution, and the formation of a looser supermolecular structure are responsible for the enhanced radiation sensitivity of the polymers prepared under the chain-transfer reaction conditions.
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References
W. M. Moreau, Semiconductor Lithography (Plenum, New York, 1988; Mir, Moscow, 1990).
S. A. Bulgakova, Yu. D. Semchikov, V. V. Semenov, et al., Polymer Science, Ser. B 37, 174 (1995) [Vysokomol. Soedin., Ser. B 37, 706 (1995)].
Yu. A. Ol'dekop and N. A. Maier, An Introduction to Organoelement Chemistry (Nauka i Tekhnika, Minsk, 1973) [in Russian].
L. V. Gurvich, G. V. Karachevtsev, V. N. Kondrat'ev, et al., Bond-Breaking Energies. Chemical. Ionization Potentials and Electron Affinity (Nauka, Moscow, 1974) [in Russian].
M. Kumada and K. Tamao, Adv. Organomet. Chem. 6, 19 (1968).
E. Hengge, Top. Curr. Chem. 51, 1 (1974).
A. Weissberger, E. Proskauer, J. Riddick, and E. Toops, Organic Solvents. Physical Properties and Methods of Purification (Wiley, New York, 1955; Inostrannaya Literatura, Moscow, 1958).
S. A. Bulgakova, A. Ya. Lopatin, V. I. Luchin, et al., Poverkhnost. Rentgen. Sinkhrotron. Neitron. Issled., No. 1, 140 (2000).
A. M. Toroptseva, K. V. Belogorodskaya, and V. M. Bondarenko, Laboratory Manual on Chemistry and Technology of Polymers (Khimiya, Leningrad, 1972) [in Russian].
V. F. Ur'yash, A. N. Mochalov, and V. A. Pokrovskii, in Thermodynamics of Organic Compounds (Gor'k. Gos. Univ., Gorky, 1978), No. 7, p. 88.
R. A. Kamskii and V. A. Myachev, in Physicochemical Principles of Polymer Synthesis and Processing (Gor'k. Gos. Univ., Gorky, 1983), p. 108.
K. V. Kir'yanov, in Thermodynamics of Organic Compounds (Gor'k. Gos. Univ., Gorky, 1983), p. 58.
J. Rabek, Experimental Methods in Polymer Chemistry (Chichester, Wiley, 1980; Mir, Moscow, 1983).
D. I. Svergun and L. A. Feigin, X-Ray and Neutron Small-Angle Scattering (Nauka, Moscow, 1986) [in Russian].
J. L. Franklin and H. E. Lumpkin, J. Am. Chem. Soc. 74, 1023 (1952).
A. A. Askadskii, Structure and Properties of Thermally Stable Polymers (Khimiya, Moscow, 1981) [in Russian].
W. Sharma, R. Pethrik, and S. Affrossman, Polymer 23, 1732 (1982).
G. V. Schulz, G. Henrici, and S. Olive, J. Polym. Sci. 17, 45 (1955).
A. Guinier, Rentgenography of Crystals. The Theory and Practice (Dunod, Paris, 1956; Fizmatgiz, Moscow, 1961).
E. A. Porai-Koshits and V. N. Filipovich, in Methods of Characterization of Structure of Finely Divided Dispersed and Porous Materials (Akad. Nauk SSSR, Moscow, 1958), p. 7.
V. Stetton, in Newer Methods of Polymer Characterization, Ed. by B. Ke (Wiley, New York, 1964; Mir, Moscow, 1966), Chap. 6.
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Original Russian Text © S.A. Bulgakova, Yu.D. Semchikov, K.V. Kir’yanov, T.A. Gracheva, K.S. Klychkov, 2008, published in Vysokomolekulyarnye Soedineniya, Ser. A, 2008, Vol. 50, No. 7, pp. 1223–1230.
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Bulgakova, S.A., Semchikov, Y.D., Kir’yanov, K.V. et al. Physical aspects of the effect of chain transfer agents on the properties of poly(methyl methacrylate). Polym. Sci. Ser. A 50, 792–797 (2008). https://doi.org/10.1134/S0965545X08070092
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DOI: https://doi.org/10.1134/S0965545X08070092