Abstract
The influence of exposure to weak laser radiation during heat treatment on a vanadium-silicon composite is investigated. It is found that the changes in the phase composition of the contact cause changes in its electrophysical parameters. Application of a combined treatment permits the formation of a rectifying vanadium-silicon contact with definite prespecified electrophysical parameters.
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References
J. M. Poate, K. N. Tu, and J. W. Mayer (eds.), Thin Films — Interdiffusion and Reactions, Wiley-Interscience, New York (1978) [Russ. transl., Mir, Moscow (1982)].
D. T. Alimov, V. K. Tyugai, and P. K. Khabibulaev, Dokl. Akad. Nauk UzSSR (4), 23 (1985).
D. T. Alimov, V. K. Tyugai, P. K. Khabibulaev et al., Zh. Fiz. Khim. 61, 3065 (1987).
Handbook of Thin-Film Technology, L. I. Maissel and R. Glang (eds.), McGraw-Hill, New York (1970) [Russ. transl., Sov. Radio, Moscow (1977)].
E. H. Roderick, Metal-Semiconductor Contacts, Clarendon Press, Oxford (1980) [Russ. transl., Radio i Svyaz’, Moscow (1982)].
A. M. Chaplanov and A. N. Shibko, Neorg. Mater. 29, 1477 (1993).
S. P. Murarka, Silicides for VLSI Applications, Academic Press, New York (1983) [Russ. transl., Mir, Moscow (1986)].
V. M. Strikha, Radiotekh. Elektron. 11, 2092 (1966).
V. M. Strikha, E. V. Buzaneva, and I. A. Radzievskii, Schottky Barrier Semiconductor Devices [in Russian], Sov. Radio, Moscow (1974).
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Zh. Tekh. Fiz. 67, 96–99 (June 1997)
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Chaplanov, A.M., Shibko, A.N. Influence of heat treatment and exposure to laser radiation on a vanadium-silicon composite. Tech. Phys. 42, 672–675 (1997). https://doi.org/10.1134/1.1258600
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DOI: https://doi.org/10.1134/1.1258600