Frequency Response Characteristics Of A Mechanical Surface Profilometer

G. A. Al-Jumaily; S. R. Wilson; K. C. Jungling; J. R. McNeil; Jean M. Bennett

doi:10.1117/12.7974177

1 September 1987 Frequency Response Characteristics Of A Mechanical Surface Profilometer

G. A. Al-Jumaily, S. R. Wilson, K. C. Jungling, J. R. McNeil, Jean M. Bennett

Author Affiliations +

Optical Engineering, Vol. 26, Issue 9, 269953 (September 1987). https://doi.org/10.1117/12.7974177

Abstract

The frequency response characteristics of a mechanical surface profilometer were examined. The treatment was based on a computational model that tracks the motion of a spherical stylus as it traces a mathematically defined surface. The stylus was found to possess a nonlinear response to the surface profile. The effects of the nonlinearity on the frequency response and spatial frequency bandwidth of the stylus profilometer were examined. The model assumes that no external force acts on the stylus; therefore, effects such as surface deformation were not investigated.

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G. A. Al-Jumaily, S. R. Wilson, K. C. Jungling, J. R. McNeil, and Jean M. Bennett "Frequency Response Characteristics Of A Mechanical Surface Profilometer," Optical Engineering 26(9), 269953 (1 September 1987). https://doi.org/10.1117/12.7974177

Published: 1 September 1987

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