Measuring surface roughness of an optical thin film with scanning tunneling microscopes

Khaled J. Habib; Virgil B. Eling; C. Wu

doi:10.1117/12.20373

1 August 1990 Measuring surface roughness of an optical thin film with scanning tunneling microscopes

Khaled J. Habib, Virgil B. Eling, C. Wu

Proceedings Volume 1270, Optical Thin Films and Applications; (1990) https://doi.org/10.1117/12.20373
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Surface roughness of a fine metallic film. i.e.. mirror finished. has been determined by a Scanning Tunneling Microscope (STM). The mean value o the roughness is measured based on STM images of a three dimensional line plot of the surface profile. The technique is found capable of determining the roughness in a nanoscopic scale, lO m. Such technique is used in the present work to measure the roughness of various thin films ( 1 5 tm) in amorphous and crystalline structures.

Citation Download Citation

Khaled J. Habib, Virgil B. Eling, and C. Wu "Measuring surface roughness of an optical thin film with scanning tunneling microscopes", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); https://doi.org/10.1117/12.20373

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