We present an analytic model that explains the self-ordering of quantum nanostructures grown on nonplanar surfaces. Self-limiting growth in these structures results from the interplay among growth-rate anisotropy, curvature-induced capillarity, and, for alloys, entropy of mixing effects. Experimental results on self-limiting organometallic chemical vapor deposition on corrugated surfaces are in quantitative agreement with the model. The implications of the self-limiting growth characteristics on the self-ordering of quantum wells, wires, and dots are discussed.

• Received 1 June 1998

DOI:https://doi.org/10.1103/PhysRevLett.81.2962