The interfacial roughness of a magnetron-sputtered $\mathrm{Si}\left(001\right)/[\mathrm{Co}\mathrm{}12\mathrm{}\mathrm{\AA }/\mathrm{C}\mathrm{u}\mathrm{}9.7\mathrm{}\mathrm{\AA }{]}_{30}/(\mathrm{Cu}\mathrm{}30\mathrm{}\mathrm{\AA })$ multilayer was investigated by x-ray scattering, and partial conformal roughness was observed. Specular, longitudinal, and transverse diffuse intensities were acquired by a high-resolution triple-crystal x-ray diffractometer and evaluated simultaneously based on the distorted-wave Born approximation. An approach to the analysis of the diffuse signal is proposed.

• Received 6 March 1997

DOI:https://doi.org/10.1103/PhysRevB.56.6474