A CMOS-compatible fluid density sensor

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Published under licence by IOP Publishing Ltd
, , Citation David Westberg et al 1997 J. Micromech. Microeng. 7 253 DOI 10.1088/0960-1317/7/3/047

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1 Dept. of Solid State Electronics, Chalmers University of Technology, S-412 96 Göteborg, Sweden

2 Physical Electronics Laboratory, HPT H6, ETH Zürich, CH-8093 Zürich, Switzerland

3 Presented on 22 October 1996, accepted for publication 9 April 1997

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0960-1317/7/3/253

Abstract

We report a CMOS-compatible resonant sensor to measure the density of fluids. The device is fabricated using a standard CMOS process followed by simple post-processing consisting of sacrificial aluminium etching and silicon bulk micromachining. The sample volume of liquid probed by the resonating structure is only 11 pl.

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10.1088/0960-1317/7/3/047