Advances in traceable nanometrology at the National Physical Laboratory^†

The only difference between nanotechnology and many other fields of science or engineering is that of size. Control in manufacturing at the nanometre scale still requires accurate and traceable measurements whether one is attempting to machine optical quality glass or write one's company name in single atoms. A number of instruments have been developed at the National Physical Laboratory that address the measurement requirements of the nanotechnology community and provide traceability to the definition of the metre. The instruments discussed in this paper are an atomic force microscope and a surface texture measuring instrument with traceable metrology in all their operational axes, a combined optical and x-ray interferometer system that can be used to calibrate displacement transducers to subnanometre accuracy and a co-ordinate measuring machine with a working volume of (50 mm)³ and 50 nm volumetric accuracy.