Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Yu, Xin; Arbabi, Ehsan; Goddard, Lynford L.; Li, Xiuling; Chen, Xiaogang

doi:10.1063/1.4927243

Title: Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Journal Article · Mon Jul 20 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4927243· OSTI ID:1875679

Yu, Xin ^[1]; Arbabi, Ehsan ^[2]; Goddard, Lynford L. ^[2]; Li, Xiuling ^[2];

^[2]

Univ. of Illinois, Urbana, IL (United States); California Institute of Technology (CalTech), Pasadena, CA (United States)
Univ. of Illinois, Urbana, IL (United States)

We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. Furthermore, the highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; NSF CAREER; USDOE

Grant/Contract Number:: FG02-07ER46471

OSTI ID:: 1875679

Alternate ID(s):: OSTI ID: 1226776

Journal Information:: Applied Physics Letters, Vol. 107, Issue 3; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 33 works

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Infrared tubular microcavity based on rolled-up GeSn/Ge nanomembranes Wu, Xiang; Tian, Ziao; Cong, Hui Nanotechnology, Vol. 29, Issue 42 https://doi.org/10.1088/1361-6528/aad66e	journal	August 2018
Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides Yu, Xin; Goddard, Lynford L.; Zhu, Jinlong Applied Physics Letters, Vol. 112, Issue 2 https://doi.org/10.1063/1.5017707	journal	January 2018
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