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Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy

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Abstract

Microelectromechanical systems (MEMS) are poised to bring the next technology revolution. At present, many of these are fabricated from silicon using lithographic techniques developed in the microelectronics industry. Due to the large surface area to volume ratio on the micrometer scale, surface forces, such as adhesion and friction, are often detrimental to the fabrication and operation of MEMS devices. Thus, one of the key issues in MEMS is surface engineering to reduce adhesion and friction. Here, we present a general strategy for the efficient assembly of organic layers directly onto the silicon surface in both vacuum environment and solution phases via the robust Si–N or Si–O linkage. This is achieved by the reaction between an amine or alcohol functional group and a chlorinated Si surface. The resulting surface assemblies are thermally stable. Characterization by interfacial force microscope (IFM) reveals that these assemblies have very low surface energy and are mechanically stable.

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Authors and Affiliations

  1. Department of Chemistry, University of Minnesota, Minneapolis, MN, 55455, USA

    X.‐Y. Zhu

  2. Sandia National Laboratory, Albuquerque, NM, 87185, USA

    J.E. Houston

Authors
  1. X.‐Y. Zhu
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  2. J.E. Houston
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Zhu, X., Houston, J. Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy. Tribology Letters 7, 87–90 (1999). https://doi.org/10.1023/A:1019169303629

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  • DOI: https://doi.org/10.1023/A:1019169303629

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