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Tribological Challenges in Micromechanical Systems

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Abstract

Despite much progress in surface micromachining technology, adhesion, friction and wear remain key issues, severely limiting the realization and reliability of many microelectromechanical systems (MEMS) devices. In this article, we focus on the use of molecularly thin organic films as release and anti-stiction coatings for MEMS. The various classes of organic films explored for MEMS are reviewed here, followed by a discussion of the current limitations and areas for improvements for this coating technology.

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Authors and Affiliations

  1. Department of Chemical Engineering, University of California, Berkeley, CA, 94720, USA

    Roya Maboudian, W. Robert Ashurst & Carlo Carraro

Authors
  1. Roya Maboudian
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  2. W. Robert Ashurst
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  3. Carlo Carraro
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Maboudian, R., Ashurst, W.R. & Carraro, C. Tribological Challenges in Micromechanical Systems. Tribology Letters 12, 95–100 (2002). https://doi.org/10.1023/A:1014044207344

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