Abstract
The submitted work is focused on graphene preparation using the chemical vapour deposition method employing a cost-saving cold-wall reactor. Optimization of the parameters and conditions of the growth technology was pursued. We succeeded in preparing and transferring monolayer graphene onto a dielectric substrate and in studying its properties by various analytical methods in great detail. The transferred graphene material displays well-resolved band structure. The band structure evidences that undoped material was prepared, with Dirac points lying at the Fermi level.
Graphic Abstract
Similar content being viewed by others
References
Choi W, Lahiri I, Seelaboyina R, Kang YS (2010) Synthesis of graphene and its applications: a review. Cri Rev Solid State Mater Sci 35:52
Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV (2004) Electric field effect in atomically thin carbon films. Science 306:666
Schedin F, Geim AK, Morozov SV, Hill EW, Blake P, Katsnelson MI, Novoselov KS (2007) Detection of individual gas molecules adsorbed on graphene. Nat Mater 6:652
Tanaka S, Morita K, Hibino H (2010) Anisotropic layer-by-layer growth of graphene on vicinal SiC (0001) surfaces. Phys Rev B 81:041406
Ostler M, Speck F, Gick M, Seyller T (2010) Automated preparation of high‐quality epitaxial graphene on 6H–SiC (0001). Phys Status Solidi B 247:2924
Juang ZY, Wu CY, Lu AY, Su CY, Leou KC, Chen FR, Tsai CH (2010) Graphene synthesis by chemical vapor deposition and transfer by a roll-to-roll process. Carbon 48:3169
Juang ZY, Wu CY, Lo CW, Chen WY, Juany CF, Hwang JC, Chen FR, Leou KC, Tsai CH (2009) Synthesis of graphene on silicon carbide substrates at low temperature. Carbon 47:2026
Bointon TH, Barnes MD, Russo S, Craciun MF (2015) High quality monolayer graphene synthesized by resistive heating cold wall chemical vapor deposition. Adv Mater 27:4200
Ding D, Solis-Fernandez P, Yanus RMN, Hibino H, Ago H (2017) Behaviour and role of superficial oxygen in Cu for the growth of large single-crystalline graphene. Appl Surf Sci 408:142–149
Pang J et al (2015) Oxidation as a means to remove surface contaminants on Cu foil prior to graphene growth by chemical vapor deposition. J Phys Chem C 119:13363–13368
Chen M, Haddon RC, Yan R, Bekyarova E (2017) Advances in transferring chemical vapour deposition graphene: a review. Mater Horizons 4:1054
Moulder J, Chastain J (1992) Handbook of x-ray photoelectron spectroscopy. Physical Electronics Division, Perkin-Elmer Corp, Eden Prairie
Xie W, Weng L-T, Ng KM, Chan CK, Chan C-M (2015) Clean graphene surface through high temperature annealing. Carbon 94:740–748
Alyobi MMM, Barnett CJ, Cobley RC (2017) Effects of thermal annealing on the properties of mechanically exfoliated suspended and on-substrate few-layer graphene. Crystals 7:349
Lin Y-C, Lu C-C, Yeh C-H, Jin C, Suenaga K, Chiu P-W (2012) Graphene annealing: how clean can it be? Nano Lett 12:414–419
Ni ZH, Wang HM, Luo ZQ, Wang YY, Yu T, Wu YH, Shen ZX (2010) The effect of vacuum annealing on graphene. J Raman Spectrosc 41:479–483
Machac P, Blahova V (2016) Graphene growth by chemical vapor deposition process oncopper foil. ElectroScope 3:1
Miseikis V, Bianco F, David J, Gemmi M, Pellegrini V, Romagnoli M, Colleti C (2017) Deterministic patterned growth of high-mobility large-crystal graphene: a path towards wafer scale integration. 2D Mater 4:021004
Chaitoglou S, Bertran E (2017) Effect of temperature on graphene grown by chemical vapor deposition. J Mater Sci 52:8348
Koon DW, Hermanova M, Nahlik J (2015) Electrical conductance sensitivity functions for square and circular cloverleaf van der Pauw geometries. Meas Sci Technol 26:115004
Machac P, Hrebicek T (2016) Synthesis of graphene on Ni/SiC structure. J. Electr Eng 67:147–149
Guermoune A et al (2011) Chemical vapor deposition synthesis of graphene on copper with methanol, ethanol, and propanol precursors. Carbon 49:4204
Pimenta MA, Dresselhaus G, Dresselhaus MS, Cancado LC, Jorio A, Saito R (2007) Studying disorder in graphite-based systems by Raman spectroscopy. Phys Chem Chem Phys 9:1276
Schmieg SJ, Belton DN (1992) Highly oriented pyrolytic graphite by XPS. Surface Sci Spectra 1:333
Blume R, Rosenthal D, Tessonnier J-P, Li H, Knop-Gericke A, Schlogl R (2015) Characterizing graphitic carbon with X‐ray photoelectron spectroscopy: a step‐by‐step approach. ChemCatChem 7:2871
Poirier DM, Weaver JH (1993) Carbon (as graphite, buckminsterfullerene, and diamond) by XPS. Surf Sci Spectra 2:232
Sato T, Takahashi T (2011) Angle-resolved photoemission spectroscopy of graphene, graphite, and related compounds. Compr Semicond Sci Technol 1:383
Sutter P, Hybertsen MS, Sadowski JT, Sutter E (2009) Electronic structure of few-layer epitaxial graphene on Ru (0001). Nano Lett 9:2654
Knox KR, Wang S, Morgante A, Cvetko D, Locatelli A, Mentes TO, Nino MA, Kim P, Osgood RM Jr (2008) Spectromicroscopy of single and multilayer graphene supported by a weakly interacting substrate. Phys Rev B 78:201408(R)
Knox KR, Locatelli A, Yilmaz MB, Cvetko D, Mentes TO, Nino MA, Kim P, Morgante A, Osgood RM Jr (2011) Making angle-resolved photoemission measurements on corrugated monolayer crystals: suspended exfoliated single-crystal graphene. Phys Rev B 84:115401
Acknowledgements
This study was supported by the Czech Science Foundation, Project No. 17-00607S.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Machac, P., Cichon, S., Lapcak, L. et al. Graphene prepared by chemical vapour deposition process. Graphene Technol 5, 9–17 (2020). https://doi.org/10.1007/s41127-019-00029-6
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s41127-019-00029-6