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Design and optimization of MEMS based piezoelectric actuator for drug delivery systems

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Abstract

In this paper, piezoelectric principle based an actuator is design for a micropump, which is suitable for drug delivery systems. The natural frequency and stress analysis have been performed to determine the reliability of the device in terms of minimum safety factor. We have observed the uniform deflections of the actuators by varying the thicknesses of the piezoelectric layer of the actuator. The design of the actuators is considered in circular and rectangular geometry. The materials are selected appropriately such that the component is biocompatible and can be used in biomedical applications. Among the various considerations made on dimensions and geometry, it is observed that the circular piezoelectric actuator undergoes a high displacement of 2950 μm at an infinitesimal thickness of 0.1 μm. At minimum safety factor of one, the maximum stress and voltage the actuator can hold is 596 GPa and 8500 V respectively.

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Acknowledgements

This document is prepared with the support of NMDC, Department of ECE, NIT Silchar for providing necessary FEM tools.

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Authors and Affiliations

  1. MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Vaddeswaram, Guntur, Andhra Pradesh, 522502, India

    K. Srinivasa Rao, Md. Hamza & P. Ashok Kumar

  2. National MEMS Design Center, Department of ECE, National Institute of Technology, Silchar, Assam, India

    K. Girija Sravani

Authors
  1. K. Srinivasa Rao
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  2. Md. Hamza
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  3. P. Ashok Kumar
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  4. K. Girija Sravani
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Correspondence to K. Srinivasa Rao.

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Srinivasa Rao, K., Hamza, M., Ashok Kumar, P. et al. Design and optimization of MEMS based piezoelectric actuator for drug delivery systems. Microsyst Technol 26, 1671–1679 (2020). https://doi.org/10.1007/s00542-019-04712-9

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