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A Linearized Method to Measure Dynamic Friction of Microdevices

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Abstract

We propose and evaluate a linearized method to measure dynamic friction between micromachined surfaces. This linearized method reduces the number of data points needed to obtain dynamic friction data, minimizing the effect of wear on sliding surfaces during the measurement. We find that the coefficient of dynamic friction is lower than the coefficient of static friction, while the adhesive pressure is indistinguishable for the two measurements. Furthermore, after an initial detailed measurement is made on a device type, the number of trial runs required to take the data on subsequent devices can be reduced from 200 to approximately 20.

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Acknowledgments

Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy under Contract DE-AC04-94AL85000.

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Author notes

  1. A. D. Corwin

    Present address: GE Global Research Center, Niskayuna, NY, 12309, USA

  2. M. P. de Boer

    Present address: Mechanical Eng. Department, Carnegie Mellon University, Pittsburgh, PA, 15213, USA

Authors and Affiliations

  1. MEMS Core Technologies Department, Sandia National Laboratories, Albuquerque, NM, 87185, USA

    A. D. Corwin & M. P. de Boer

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  1. A. D. Corwin
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  2. M. P. de Boer
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Correspondence to A. D. Corwin.

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Corwin, A.D., de Boer, M.P. A Linearized Method to Measure Dynamic Friction of Microdevices. Exp Mech 49, 395–401 (2009). https://doi.org/10.1007/s11340-008-9158-9

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  • DOI: https://doi.org/10.1007/s11340-008-9158-9

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