Skip to main content
SpringerLink
Log in

Gas-Phase Chemistry of Pulsed n-Hexane Discharge

  • Original Paper
  • Published:
Plasma Chemistry and Plasma Processing Aims and scope Submit manuscript

Abstract

Many types of carbon films are being investigated for use in many different applications for their electrical, mechanical, and optical properties. Organic based plasmas are beginning to be used for the production of a wide variety of novel film stacks. The use of these stacks can range from sensor to dielectrics for flexible electronics to biocompatible surfaces. Knowledge of how these films actually grow is largely unknown. In light of this, we have performed Fourier transform infrared (FTIR) spectroscopy to the study of hexane plasmas. We use this diagnostic to identify different plasma-produced daughter species produced from n-hexane. For example, we observe the creation of methane, ethylene, and acetylene. From this we develop a likely dissociation model for the parent gas.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  1. Beake B, Zheng S, Alexander M (2002) J Mater Sci 37:3821

    Article  Google Scholar 

  2. Möller W (1993) Appl Phys A 56:527

    Article  Google Scholar 

  3. Cui F, Li D (2000) Surf Coat Technol 131:481

    Article  Google Scholar 

  4. Donnet C (1998) Surf Coat Technol 100–101:180

    Article  Google Scholar 

  5. Hargis P Jr, Greenberg K, Miller P, Gerardo J, Torczynski J, Riley M, Hebner G, Roberts J, Olthoff J, Whetstone J, Van Brunt R, Sobolewski M, Anderson H, Splichal M, Mock J, Bletzinger P, Garscadden A, Gottscho R, Selwyn G, Dalvie M, Heldenreich J, Butterbaugh J, Brake M, Passow M, Pender J, Lujan A, Elta M, Graves D, Sawin H, Kushner M, Verdeyen J, Horwath R, Turner T (1994) Rev Sci Instrum 65:140

    Article  ADS  Google Scholar 

  6. Jindal A, Prengler A, Overzet L, Goeckner M (2006) J Vac Sci Technol A 24:126

    Article  Google Scholar 

  7. Padron-Wells G, Jarvis B, Jindal A, Goeckner M Chemistry of di (ethylene glycol) vinyl ether pulsed plasmas for development of biocompatible thin films. Colloids Surf B: Biointerfaces (in press)

  8. Fourches N, Turban G (1996) Plasmas Polym 1:47

    Article  Google Scholar 

  9. Beake B, Leggett G, Alexander M (2001) Polymer 42:2647

    Article  Google Scholar 

  10. Sharpe S, Johnson T, Sams R, Chu P, Rhoderick G, Johnson P (2004) Appl Spectrosc 58:1452

    Article  ADS  Google Scholar 

  11. Chandrashekar A, Lee J, Lee G, Goeckner M, Overzet L (2006) J Vac Sci Technol A 24:1812

    Article  Google Scholar 

  12. Ramachandran S (2008) Study of diamond like carbon as a template for nanoimprint lithography and as a filler material for vertically aligned carbon nanotube forests. Doctoral dissertation, University of Texas at Dallas

  13. Lieberman M, Lichtenberg A (1994) Principles of plasma discharges and materials processing. Wiley, New York

    Google Scholar 

  14. Wild C, Wagner J, Koidl P (1987) J Vac Sci Technol A 5:2227

    Article  ADS  Google Scholar 

  15. Gengenbach T, Vasic Z, Chatelier R, Griesser H (1994) J Polym Sci A 32:1399

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, University of Texas at Dallas, Richardson, TX, 75080, USA

    Richard Gordon Pierce, Gabriel Padron-Wells & Matthew J. Goeckner

Authors
  1. Richard Gordon Pierce
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Gabriel Padron-Wells
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Matthew J. Goeckner
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Richard Gordon Pierce.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pierce, R.G., Padron-Wells, G. & Goeckner, M.J. Gas-Phase Chemistry of Pulsed n-Hexane Discharge. Plasma Chem Plasma Process 29, 1–11 (2009). https://doi.org/10.1007/s11090-008-9157-8

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11090-008-9157-8

Keywords

Search

Navigation