Skip to main content
SpringerLink
Log in

CMOS-compatible light-emitting devices based on thin aluminum nitride film containing Al nanocrystals

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Electroluminescence (EL) from Al-rich AlN thin films grown on p-type Si substrate by radio frequency (RF) magnetron sputtering has been observed at room temperature. The light-emitting structure based on the thin films can be driven by an electrical pulse as short as 10−5 s. No obvious change in the light emission intensity was observed after 106 pulse cycles. It has been found that the light emission intensity increases with the Al concentration. It is shown that the phenomenon is due to the enhancement of the percolative conduction via the Al nanocrystals distributed in the AlN matrix as a result of the increase in Al concentration.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P.M. Fauchet, IEEE J. Sel. Top. Quantum Electron. 4, 1020 (1998)

    Article  Google Scholar 

  2. L.-Y. Chen, W.-H. Chen, F.C.-N. Hong, Appl. Phys. Lett. 86, 193506 (2005)

    Article  ADS  Google Scholar 

  3. J. Valenta, N. Lalic, J. Linnros, Appl. Phys. Lett. 84, 1459 (2004)

    Article  ADS  Google Scholar 

  4. L. Rebohle, J. von Borany, R.A. Yankov, W. Skorupa, I.E. Tyschenko, H. Frob, K. Leo, Appl. Phys. Lett. 71, 2809 (1997)

    Article  ADS  Google Scholar 

  5. T. Matsuda, K. Nishihara, M. Kawabe, H. Iwata, S. Iwatsubo, T. Ohzone, Solid-State Electron. 48, 1933 (2004)

    Article  ADS  Google Scholar 

  6. C.-J. Lin, G.-R. Lin, IEEE J. Quantum Electron. 41, 441 (2005)

    Article  ADS  Google Scholar 

  7. P. Photopoulos, A.G. Nassiopoulou, Appl. Phys. Lett. 77, 1816 (2000)

    Article  ADS  Google Scholar 

  8. Y. Liu, T.P. Chen, H.W. Lau, J.I. Wong, L. Ding, S. Zhang, S. Fung, Appl. Phys. Lett. 89, 123101 (2006)

    Article  ADS  Google Scholar 

  9. Y. Liu, T.P. Chen, C.Y. Ng, M.S. Tse, S. Fung, Y.C. Liu, S. Li, P. Zhao, Electrochem. Solid-State Lett. 7, G134 (2004)

    Article  Google Scholar 

  10. T.P. Chen, M.S. Tse, X. Zeng, Appl. Phys. Lett. 78, 492 (2001)

    Article  ADS  Google Scholar 

  11. A.A. Middleton, N.S. Wingreen, Phys. Rev. Lett. 71, 3198 (1993)

    Article  ADS  Google Scholar 

  12. R. Parthasarathy, X.-M. Lin, H.M. Jaeger, Phys. Rev. Lett. 87, 186807 (2001)

    Article  ADS  Google Scholar 

  13. Z. Liu, T.P. Chen, Y. Liu, L. Ding, M. Yang, J.I. Wong, Z. Hong, Y.B. Li, S. Zhang, S. Fung, Appl. Phys. Lett. 92, 013102 (2008)

    Article  ADS  Google Scholar 

  14. T.L. Tansley, R.J. Egan, Phys. Rev. B, Condens. Matter 45, 10942 (1992)

    ADS  Google Scholar 

  15. C. Stampfl, C.G. Van de Walle, Phys. Rev. B, Condens. Matter 65, 155212 (2002)

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, Sichuan, 610054, People’s Republic of China

    Y. Liu & X. B. Chen

  2. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798, Singapore

    T. P. Chen, M. Yang & Z. H. Cen

  3. Center for Composite Materials, School of Astronautics, Harbin Institute of Technology, P.O. Box 3010, Harbin, 150080, People’s Republic of China

    Y. B. Li

  4. Department of Physics, The University of Hong Kong, Hong Kong, Hong Kong

    S. Fung

Authors
  1. Y. Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. T. P. Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Z. H. Cen
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. X. B. Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Y. B. Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. Fung
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to Y. Liu or T. P. Chen.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liu, Y., Chen, T.P., Yang, M. et al. CMOS-compatible light-emitting devices based on thin aluminum nitride film containing Al nanocrystals. Appl. Phys. A 95, 753–756 (2009). https://doi.org/10.1007/s00339-008-5046-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-008-5046-5

PACS

Search

Navigation