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Silicon nanowires for sequence-specific DNA sensing: device fabrication and simulation

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Abstract

Highly sensitive, sequence-specific and label-free DNA sensors were demonstrated by monitoring the electronic conductance of silicon nanowires (SiNWs) with chemically bonded single-stranded (ss) DNA or peptide nucleic acid (PNA) probe molecules. For a 12-mer oligonucleotide, tens of pM of target ss-DNA in solution was recognized when the complementary DNA oligonucleotide probe was attached to the SiNW surfaces. In contrast, ss-DNA samples of ×1000 concentration with a single-base mismatch produce only a weak signal due to nonspecific binding. In order to gain a physical understanding of the change in conductance of the SiNWs with the attachment of the DNA targets and the probes, process and device simulations of the two-dimensional cross sections of the SiNWs were performed. The simulations explained the width dependence of the SiNW conductance and provided understanding to improve the sensor performance.

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Authors and Affiliations

  1. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Road, MS 1123, Palo Alto, CA, 94304, USA

    Z. Li, B. Rajendran, T.I. Kamins, X. Li & R. Stanley Williams

  2. School of Engineering and Applied Science, University of California, Los Angeles, 48-121 Engr. IV Bldg, Box 951597, Los Angeles, CA, 90095-1597, USA

    Y. Chen

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  1. Z. Li
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  2. B. Rajendran
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  3. T.I. Kamins
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  4. X. Li
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  5. Y. Chen
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  6. R. Stanley Williams
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Correspondence to Z. Li.

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PACS

85.35.-p; 87.83.+a; 07.07.Df

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Li, Z., Rajendran, B., Kamins, T. et al. Silicon nanowires for sequence-specific DNA sensing: device fabrication and simulation. Appl. Phys. A 80, 1257–1263 (2005). https://doi.org/10.1007/s00339-004-3157-1

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  • DOI: https://doi.org/10.1007/s00339-004-3157-1

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