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Applications of near-field optics to the characterization of optoelectronics components

Applications de l’optique en champ proche à la caractérisation de Composants Optoélectroniques

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Abstract

In the race towards purely optical communications, the necessity of producing integrated components is linked to the requirement for the precise characteriza-tion of optoelectronic components. Near-field detection techniques meet this requirement, AFM (Atomic Force Microscopy), for instance, can provide the topography of a given sample. In conjunction with these new tools, several different kinds of near-field optical microscopes (NFOM) have appeared. They enable the characteriza-tion of the components with a resolution better than that imposed by the Rayleigh criterion. This is primarily due to the fact that they are sensitive to the evanescent waves. This document presents several areas related to telecommunications where near-field optics has become relevant.

Résumé

Dans la course au tout optique, la nécessite de réali-ser des composants intégrés s’accompagne de L’obliga-tion de la caractérisation fine de ces composants. Les techniques de détection en champ proche répondent à ces besoins. La microscopie à force atomique AFM peut fournir la topographie de divers éléments. En paral-léle de ces nouveaux outils, diverses microscopies en champ proche optique ont vu le jour, elles permettent d’accéder a la caractérisation des composants avec une resolution qui dépasse le critére de Rayleigh, ceci parce qu’elles détectent entre autres les ondes évanescentes. Nous avons choisi de présenter quelques domaines liées aux télécommunications oÙ I’optique en champ proche a fait pour l’instant une incursion.

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  1. Groupe d’Optique de Champ Proche, Laboratoire de Physique de l’Université de Bourgogne, UPRES A CNRS 5027, 9, avenue Alain Savary, BP 400 21011, Dijon, France

    Laurent Salomon & Frédérique de Fornel

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Salomon, L., Fornel, F.d. Applications of near-field optics to the characterization of optoelectronics components. Ann. Télécommun. 52, 594–612 (1997). https://doi.org/10.1007/BF02997616

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