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Carbon Nanotube Forests on SiC: Structural and Electrical Properties

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Novel Structured Metallic and Inorganic Materials

Abstract

Because carbon nanotube forest formed by surface decomposition of silicon carbide (CNT forest on SiC) is densely packed and vertically aligned with no entangle parts, it is useful to investigate the electrical properties of dense CNT forest. CNTs atomically bond to SiC substrates, causing good electrical contact for SiC power devices, where the Schottky barrier height is considerably low as ~0.4 eV. CNTs contact with each other in dense CNT forest and contact conductance of CNT/CNT interface can be evaluated as ~108 S cm−2. This value corresponds to the tunneling conductance between electron clouds of adjacent graphene sheets.

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References

  1. P. Avouris, Chem. Phys. 281, 429 (2002)

    Article  CAS  Google Scholar 

  2. E. Pop, D. Mann, Q. Wang, K. Goodson, H. Dai, Nano Lett. 6, 96 (2006)

    Article  CAS  Google Scholar 

  3. S.K. Vashist, D. Zheng, K. Al-Rubeaan, J.H. Luong, F. Sheu, Biotechnol. Adv. 29, 2 (2011)

    Article  Google Scholar 

  4. A. Izadi-Najafabadi, T. Yamada, D.N. Futaba, M. Yudasaka, H. Takagi, H. Hatori, H. Iijima, K. Hata, ACS Nano 5, 2 (2011)

    Article  Google Scholar 

  5. V. Sangwan, A. Southard, T. Moore, V. Ballarotto, D. Hines, M. Fuhrer, E. Williams, Microelectron. Eng. 88, 10 (2011)

    Article  Google Scholar 

  6. M. Kusunoki, M. Rokkaku, T. Suzuki, Appl. Phys. Lett. 71, 2620 (1997)

    Article  CAS  Google Scholar 

  7. T. Nagano, Y. Ishikawa, N. Shibata, Jpn. J. Appl. Phys. 42, 1380 (2003)

    Article  CAS  Google Scholar 

  8. H. Konishi, H. Matsuoka, N. Toyama, M. Naitoh, S. Nishigaki, M. Kusunoki, Thin Solid Films 464, 295 (2004)

    Article  Google Scholar 

  9. K. Hayashi, S. Mizuno, S. Tanaka, H. Toyoda, H. Tochihara, I. Suemune, Jpn. J. Appl. Phys. 44, L803 (2005)

    Article  CAS  Google Scholar 

  10. T. Maruyama, H. Bang, Y. Kawamura, N. Fujita, K. Tanioku, T. Shiraiwa, Y. Hozumi, S. Naritsuk, M. Kusunoki, Chem. Phys. Lett. 423, 317 (2006)

    Article  CAS  Google Scholar 

  11. H. Bang, Y. Ito, Y. Kawamura, E. Hosoda, C. Yoshida, T. Maruyama, S. Naritsuka, M. Kusunoki, Jpn. J. Appl. Phys. 45, 372 (2006)

    Article  CAS  Google Scholar 

  12. T. Maruyama, H. Bang, N. Fujita, Y. Kawamura, S. Naritsuka, M. Kusunoki, Diam. Relat. Mater. 16, 1078 (2007)

    Article  CAS  Google Scholar 

  13. M. Kusunoki, C. Honjo, T. Suzuki, T. Hirayama, Appl. Phys. Lett. 87, 103105 (2005)

    Article  Google Scholar 

  14. M. Inaba, K. Suzuki, M. Shibuya, C. Lee, Y. Masuda, N. Tomatsu, W. Norimatsu, A. Hiraiwa, M. Kusunoki, H. Kawarada, Appl. Phys. Lett. 106, 123501 (2015)

    Article  Google Scholar 

  15. M. Kusunoki, T. Suzuki, C. Honjo, T. Hirayama, N. Shibata, Chem. Phys. Lett. 366, 458 (2002)

    Article  CAS  Google Scholar 

  16. H. Na, H. Kim, K. Adachi, N. Kiritani, S. Tanimoto, H. Okushi, K. Arai, J. Electron. Mater. 33, 2 (2004)

    Article  Google Scholar 

  17. M. Inaba, K. Suzuki, Y. Hirano, W. Norimatsu, M. Kusunoki, H. Kawarada, Mater. Sci. Rep. 858, 561 (2016)

    Google Scholar 

  18. F. Padovani, R. Stratton, Solid-State Electron 9, 7 (1966)

    Article  Google Scholar 

  19. C. Crowell, V. Rideout, Solid-State Electron 12, 2 (1969)

    Google Scholar 

  20. S. Xu, Z.L. Wang, Nano Res. 4, 11 (2011)

    Google Scholar 

  21. P. De Pablo, M. Martı́nez, J. Colchero, J. Gomez-Herrero, W. Maser, A. De Benito, E. Munoz, A. Baro, Mater. Sci. Eng. C 15, 1 (2001)

    Article  Google Scholar 

  22. W.B. Choi, E. Bae, D. Kang, S. Chae, B. Cheong, J. Ko, E. Lee, W. Park, Nanotechnology 15, 10 (2004)

    Google Scholar 

  23. S. Suzuki, Y. Watanabe, Y. Homma, S. Fukuba, S. Heun, A. Locatelli, Appl. Phys. Lett. 85, 127 (2004)

    Article  CAS  Google Scholar 

  24. Z. Xu, X. Bai, E. Wang, Z.L. Wang, Appl. Phys. Lett. 87, 163106 (2005)

    Article  Google Scholar 

  25. T. Maruyama, S. Sakakibara, S. Naritsuka, W. Norimatsu, M. Kusunoki, H. Yamane, N. Kosugi, Appl. Phys. Lett. 101, 092106 (2012)

    Article  Google Scholar 

  26. T. Seyller, K. Emtsev, F. Speck, K. Gao, L. Ley, Appl. Phys. Lett. 88, 242103 (2006)

    Article  Google Scholar 

  27. S. Cheung, N. Cheung, Appl. Phys. Lett. 49, 85 (1986)

    Article  CAS  Google Scholar 

  28. L. Pauling, J. Am. Chem. Soc. 54, 9 (1932)

    Article  Google Scholar 

  29. F. Buonocore, F. Trani, D. Ninno, A. Di Matteo, G. Cantele, G. Iadonisi, Nanotechnology 19, 025711 (2008)

    Article  CAS  Google Scholar 

  30. S. Rajput, M. Chen, Y. Liu, Y. Li, M. Weinert, L. Li, Nat. Commun. 4, 2752 (2013)

    Article  CAS  Google Scholar 

  31. G. Zhong, T. Iwasaki, J. Robertson, H. Kawarada, J. Phys. Chem. B 111, 1907 (2007)

    Article  CAS  Google Scholar 

  32. D. Yokoyama, T. Iwasaki, K. Ishimaru, S. Sato, T. Hyakushima, M. Nihei, Y. Awano, H. Kawarada, Jpn. J. Appl. Phys. 47, 1985 (2008)

    Article  CAS  Google Scholar 

  33. Y. Awano, S. Sato, M. Nihei, T. Sakai, Y. Ohno, T. Mizutani, Proc. IEEE 98, 2015 (2010)

    Article  CAS  Google Scholar 

  34. R. Quintero, D.Y. Kim, K. Hasegawa, Y. Yamada, A. Yamada, S. Noda, RSC Adv. 4, 8230 (2014)

    Article  CAS  Google Scholar 

  35. B. Brown B, C. B. Parker CB, B. R. Stoner BR, W. M. Grill WM, and J. T. Glass JT, (2012) J. Phys. Chem. C 116:19526 (2012)

    Article  CAS  Google Scholar 

  36. E. Teblum, M. Noked, J. Grinblat, A. Kremen, M. Muallem, Y. Fleger, Y.R. Tischler, D. Aurbach, G.D. Nessim, J. Phys. Chem. C 118, 19345 (2014)

    Article  CAS  Google Scholar 

  37. J. Kalupson, D. Ma, C.A. Randall, R. Rajagopalan, K. Adu, J. Phys. Chem. C 118, 2943 (2014)

    Article  CAS  Google Scholar 

  38. A.-R. Rautio, O. Pitkänen, T. Järvinen, A. Samikannu, N. Halonen, M. Mohl, J.-P. Mikkola, K. Kordas, J. Phys. Chem. C 119, 3538 (2015)

    Article  CAS  Google Scholar 

  39. M. Kusunoki, T. Suzuki, T. Hirayama, N. Shibata, K. Kaneko, Appl. Phys. Lett. 77, 531 (2000)

    Article  CAS  Google Scholar 

  40. Z.G. Cambaz, G. Yushin, S. Osswald, V. Mochalin, Y. Gogotsi, Carbon 46, 841 (2008)

    Article  CAS  Google Scholar 

  41. M. Kusunoki, H. Kato, Appl. Surf. Sci. 254, 257 (2007)

    Article  CAS  Google Scholar 

  42. W. Norimatsu, T. Maruyama, K. Yoshida, K. Takase, M. Kusunoki, Appl. Phys. Express 5, 105102 (2012)

    Article  Google Scholar 

  43. M. Inaba, C. Lee, K. Suzuki, M. Shibuya, M. Myodo, Y. Hirano, W. Norimatsu, M. Kusunoki, H. Kawarada, J. Phys. Chem. C 120, 6232 (2016)

    Article  CAS  Google Scholar 

  44. L. van der Pauw, Philips Res. Rep. 13, 1 (1958)

    Google Scholar 

  45. R. Marega, G. Accorsi, M. Meneghetti, A. Parisini, M. Prato, D. Bonifazi, Carbon 47, 675 (2009)

    Article  CAS  Google Scholar 

  46. S. De, J.N. Coleman, ACS Nano 4, 2713 (2010)

    Article  CAS  Google Scholar 

  47. P.Y. Huang, C.S. Ruiz-Vargas, A.M. van der Zande, W.S. Whitney, M.P. Levendorf, J.W. Kevek, S. Garg, J.S. Alden, C.J. Hustedt, Y. Zhu, Nature 469, 389 (2011)

    Article  CAS  Google Scholar 

  48. S. Peng, Z. Jin, P. Ma, D. Zhang, J. Shi, J. Niu, X. Wang, S. Wang, M. Li, X. Liu, Carbon 82, 500 (2015)

    Article  CAS  Google Scholar 

  49. M. Miao, Carbon 49, 3755 (2011)

    Article  CAS  Google Scholar 

  50. M. Kusunoki, T. Suzuki, C. Honjo, H. Usami, H. Kato, J Phys D 40, 6278 (2007)

    Article  CAS  Google Scholar 

  51. R. Saito, T. Takeya, T. Kimura, G. Dresselhaus, M.S. Dresselhaus, Phys. Rev. B 57, 4145 (1998)

    Article  CAS  Google Scholar 

  52. R.S. Ruoff, J. Tersoff, D.C. Lorents, S. Subramoney, B. Chan, Nature 364, 514 (1993)

    Article  CAS  Google Scholar 

  53. J. Tersoff, R.S. Ruoff, Phys. Rev. Lett. 73, 676 (1994)

    Article  CAS  Google Scholar 

  54. M.J. Lopez, A. Rubio, J.A. Alonso, L.-C. Qin, S. Iijima, Phys. Rev. Lett. 86, 3056 (2001)

    Article  CAS  Google Scholar 

  55. C. Zhang, K. Bets, S.S. Lee, Z. Sun, F. Mirri, V.L. Colvin, B.I. Yakobson, J.M. Tour, R.H. Hauge, ACS Nano 6, 6023 (2012)

    Article  CAS  Google Scholar 

  56. M. Arai, S. Utsumi, M. Kanamaru, K. Urita, T. Fujimori, N. Yoshizawa, D. Noguchi, K. Nishiyama, Y. Hattori, F. Okino, Nano Lett. 9, 3694 (2009)

    Article  CAS  Google Scholar 

  57. X. Meng, M. Li, Z. Kang, X. Zhang, J. Xiao, J. Phys. D 46, 055308 (2013)

    Article  Google Scholar 

  58. J.G. Simmons, J. Appl. Phys. 34, 2581 (1963)

    Article  Google Scholar 

  59. P.W. Sutter, J. Flege, E.A. Sutter, Nat. Mater. 7, 406 (2008)

    Article  CAS  Google Scholar 

  60. Y. Yoon, M.S.C. Mazzoni, H. Joon Choi, J. Ihm, S.G. Louie, Phys. Rev. Lett. 86, 688 (2001)

    Article  CAS  Google Scholar 

  61. S. Bae, H. Kim, Y. Lee, X. Xu, J. Park, Y. Zheng, J. Balakrishnan, T. Lei, H.R. Kim, Y.I. Song, Nat. Nanotechnol. 5, 574 (2010)

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Faculty of Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan

    Masafumi Inaba & Hiroshi Kawarada

  2. EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa, Nagoya, Aichi, 464-8603, Japan

    Wataru Norimatsu & Michiko Kusunoki

Authors
  1. Masafumi Inaba
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  2. Wataru Norimatsu
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  3. Michiko Kusunoki
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  4. Hiroshi Kawarada
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Correspondence to Masafumi Inaba .

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Editors and Affiliations

  1. Osaka University, Osaka, Japan

    Yuichi Setsuhara

  2. Tokyo Institute of Technology, Yokohama, Japan

    Toshio Kamiya

  3. Tohoku University, Sendai, Japan

    Shin-ichi Yamaura

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Inaba, M., Norimatsu, W., Kusunoki, M., Kawarada, H. (2019). Carbon Nanotube Forests on SiC: Structural and Electrical Properties. In: Setsuhara, Y., Kamiya, T., Yamaura, Si. (eds) Novel Structured Metallic and Inorganic Materials. Springer, Singapore. https://doi.org/10.1007/978-981-13-7611-5_40

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