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Micro and Nano Fabrication Technology pp 1–41Cite as

Nano-grooving by Using Multi-tip Diamond Tools

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Part of the book series: Micro/Nano Technologies ((MNT,volume 1))

Abstract

This chapter introduces nano-grooving approach by using multi-tip diamond tools to generate nanostructures such as nano-gratings/nano-grooves on large substrates. It starts by briefing the work principle and history of this nanofabrication approach. It then introduces the machining mechanism, influences of processing parameters, and tool wear on the machined nanostructures. It concludes with a summary of research challenges, current research achievements, and future research directions to systematically establish this nanofabrication approach.

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Author information

Authors and Affiliations

  1. Centre for Precision Manufacturing, Department of Design, Manufacture and Engineering Management, University of Strathclyde, Glasgow, UK

    Xichun Luo & Zhen Tong

  2. Centre for Precision Technologies, University of Huddersfield, Huddersfield, UK

    Zhen Tong

Authors
  1. Xichun Luo
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  2. Zhen Tong
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Corresponding author

Correspondence to Xichun Luo .

Editor information

Editors and Affiliations

  1. Department of Mechanical Engineering, Keio University Department of Mechanical Engineering, Yokohama, Japan

    Jiwang Yan

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Cite this entry

Luo, X., Tong, Z. (2018). Nano-grooving by Using Multi-tip Diamond Tools. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_4-2

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  • DOI: https://doi.org/10.1007/978-981-10-6588-0_4-2

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-6588-0

  • Online ISBN: 978-981-10-6588-0

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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Chapter history

  1. Latest

    Nano-grooving by Using Multi-tip Diamond Tools
    Published:
    17 April 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_4-2

  2. Original

    Nano-grooving by Using Multi-tip Diamond Tools
    Published:
    10 February 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_4-1

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