Abstract
Ion beam bombardment with energy of less than a few tens of kiloelectron volts (primary ion bombardment) onto the sample surface causes sputtering phenomena following cascade mixing in the near-surface of the sample.
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Tomita, M. (2018). Dynamic Secondary Ion Mass Spectrometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_11
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DOI: https://doi.org/10.1007/978-981-10-6156-1_11
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