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Poly(Methylsilane) And Poly(Hydrazinomethylsilane) as Precursors for Silicon-Containing Ceramics

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Book cover Applications of Organometallic Chemistry in the Preparation and Processing of Advanced Materials

Part of the book series: NATO ASI Series ((NSSE,volume 297))

Abstract

Polymethylsilane (PMS) is an excellent precursor for the preparation of thin films of amorphous SiC on useful substrates, such as silicon wafers, quartz plates and polycrystalline alumina plates. The progress of pyrolysis chemistry can be easily monitored by FTIR on films supported on silicon, down to thicknesses as low as 10- 20 nm. The reactivity of PMS, or of polycarbosilane, with ammonia permits the homogeneous N-doping of these films and they exhibit n-type semiconductivity in the range of 10-30 (Ω.cm)-1. N-doping can also be achieved by using the PMS prepared by Na coupling of MeSiHCl2. This polymer, which contains residual Si-Cl bonds, reacts readily with ammonia to produce SiNH3 +Cl- groups, which lose NH4C1 on pyrolysis to produce silazane linkages in the product preceramic. Poly(hydrazinomethylsilane) is produced by reaction of MeSiHCl2 with N2H4, in the presence of an HCl trap. This polymer may be pyrolysed to give a silicon carbonitride product with an electronic conductivity in the same range as glassy carbon (103 -104 (Ω.cm)-1. Both FTIR and NMR spectrocopies have been used to determine the structure of the polymer and of the series of intermediate materials that are produced by pyrolysis between 100 and 1500°C.

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References

  1. S. Yajima, T. Shishido, H. Kayano, Nature (London), 1978,264, 525

    Article  Google Scholar 

  2. J. Hayashi, M. Omori, S. Yajima, U.S J Patent 4,159,259, 1979

    Google Scholar 

  3. S. Yajima, J. Hayashi, M. Omori, U.S Patent 4,052,430, 1977

    Google Scholar 

  4. S. Yajima, J. Hayashi, M. Omori, Chem. Lett. 1975, 931

    Google Scholar 

  5. S. Yajima, Am.Ceram.Soc.Bull. 1983,62, 893 and 903

    CAS  Google Scholar 

  6. Y. Hasegawa, K. Okamura, LMater.Sci. 1985,20, 321.

    Google Scholar 

  7. F. Babonneau, R.M. Laine, Chem. Mater.1993, 6, 977 and refs. therein.

    Google Scholar 

  8. Z.-F. Zhang, F. Babboneau, R.M. Laine, Y.Mu, J.F. Harrod, J.A. Rahn, J.Am. Ceram. Soc. 1991, 74(3), 670.

    Article  CAS  Google Scholar 

  9. R.J.P. Corriu, M. Enders, S. Huille and J J.E. Moreau, J. Organometallics, 1994, 6, 15.

    CAS  Google Scholar 

  10. D.Seyferth, T.G. Wood, H.J. Tracy and Robison, J. Am. Ceram. Soc. 1992, 75, 1300.

    Article  CAS  Google Scholar 

  11. HJ. Wu and L. Interrante, Macromolecules, 1992,25, 1840

    Article  CAS  Google Scholar 

  12. C.K. Whitmarsh and L.V. Interrrante, Organometallics, 1991,10,1336.

    Article  CAS  Google Scholar 

  13. C.-J. Chu, S.-J. Ting, J.D. Mackenzie, Springer Proceedings in Physics, 56; Proc. Amorphous and Crystalline Silicon Carbide III. Eds. G.L. Harris, M.G. SPencer and C.Y. Yang. Springer Verlag, Berlin, 1992. pp. 87 and 93.

    Google Scholar 

  14. Y. Hattory, D. Kruangam, K. Katoh, Y. Notta, H. Okamoto and Y, Hamakawa. Proc. 19th. IEEE Photovoltaic Specialists Conf., New Orleans, 1987, p.689.

    Google Scholar 

  15. T.Kimoto, H. Nishino, A. YamashitaW.S. Woo and H. Matsunami, Springer Proceedings in Physics 71; Proc. Amorphous and Crystalline Silicon Carbide IV, Eds.C. Y. Yang, M.M. Rahman and G.L. Harris, Springer Verlag, Berlin, 1992, p. 31.

    Chapter  Google Scholar 

  16. L.B. Rowland, S. Tanaka, R.S. Kern and R.F. Davis, Springer Proceedings in Physics 71; Proc. Amorphous and Crystalline Silicon Carbide IV, Eds. C.Y. Yang, M.M. Rahman and G.L. Harris, Springer Verlag, Berlin, 1992, p. 84.

    Chapter  Google Scholar 

  17. N.T. Tran, Springer Proceedings in Physics Vol. 71; Proc. Amorphous and Crystalline Silicon Carbide IV, Eds. C.Y. Yang, M.M. Rahman and G.L. Harris, Springer Verlag, Berlin, 1992, p. 167

    Google Scholar 

  18. B.M. Manning, S.B. Hewitt, N.G. Tarr and T.W. McElwee, Springer Proceedings in Physics 71; Proc. Amorphous and Crystalline Silicon Carbide IV, Santa Clara , CA, 1992, p. 252.

    Chapter  Google Scholar 

  19. R.F. Davis, Am. Ceram. Bull. 1993, 72, 99.

    CAS  Google Scholar 

  20. M. Scarlete, S. Brienne, LS. Butler, J.F. Harrod, Chem. Mater. 1994, 6, 977

    Article  CAS  Google Scholar 

  21. Y. Mu, J.F. Harrod, R.M. Laine, J. Appl. Organomet. Chem. 1994, 8, 95.

    Article  CAS  Google Scholar 

  22. A. Solangi and M. Chaudhry, J. Mater. Res. 1992, 7, 247.

    Article  Google Scholar 

  23. D.Seyferth in Transformation of Organometallics into Common and Exotic Materials: Design and Activation; Ed.R.M. Laine. NATO ASI Series E: Appl.Sci. no.141; Martinus Nijhoff, Amsterdam, 1988. p.133.

    Chapter  Google Scholar 

  24. Y.Blum, K.B.Schwartz, R.M.Laine, J. Mater. Sei. 1989, 24, 1707

    Article  CAS  Google Scholar 

  25. D. Seyferth, G.H.Wiseman, J.M.Schwark, Y.F.Yu, C.A.Poutasse, in Inorganic and Organometallic Polymers, M.Zeldin, K.J.Kynne, H.R.Allcock, eds, ACS Symposium Ser. 1988,360, 143

    Google Scholar 

  26. Y.Blum, G.A.McDermott, in Inorganic and Organometallic Polymers and Oligo-mers, Eds. J.F.Harrod and R.M.Laine; Kluwer Academic Publishers, Dordrecht, 1991, p.161.

    Chapter  Google Scholar 

  27. M. Pückert, T. Vaahs, M. Buck, Adv. Mater. 1990,2, 398.

    Article  Google Scholar 

  28. Mu,Y.; Harrod, J.F Inorganic and Organometallic Polymers and Oligomers, Eds. J.F. Harrod and R.M. Laine; Kluwer Academic Publishers, Dordrecht, 1991; p.23.

    Chapter  Google Scholar 

  29. E. Hengge and M. Wienberger, J. Organomet. Chem. 1992,433,21.

    Article  CAS  Google Scholar 

  30. H.Q.Liu, JJF.Harrod, Organometallics 1992,11,822.

    Article  CAS  Google Scholar 

  31. M. Scarlete, J.F. Harrod, I.S. Butler, to be published.

    Google Scholar 

  32. J.S. Hartman, A. Narayanan, Y.X. Wang, J. Am. Chem. Soc., 1994,116, 4019.

    Article  CAS  Google Scholar 

  33. C. Colombier, In Proceedings of th 1st. European Ceramic Society Conference, G. Terpstra and R. Metsalaar eds.. Elsevier Science Publishers Ltd., New York, 1989, vol 1, p.143.

    Google Scholar 

  34. U. Wannegat and W. Liehr, Angew. Chem. 1957,69, 783

    Google Scholar 

  35. U. Wannegat, Adv. Inorg. Chem. Radiochem. 1964,6, 225.

    Article  Google Scholar 

  36. J. He, H.Q. Liu, J.F. Harrod and R. Hynes, Organometallics, 1994, 13, 336.

    Article  CAS  Google Scholar 

  37. J. He and JJF. Harrod, to be published.

    Google Scholar 

  38. M. Scarlete, I.S. Butler, J.F. Harrod, S. Brienne, Chem. Mat. submitted for publication.

    Google Scholar 

  39. W.C. Danen, F.A. Neugebauer, Angew. Chem. Int. Ed. Engl. 1975,14,783–.

    Article  Google Scholar 

  40. K.R. Carduner, R.O. Carter , M.E. Milberg, G.M. Crosbie.Anal. Chem, 1987, 59, 2794.

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Chemistry Department, McGill University, Montreal, QC, Canada, H3A 2K6

    M. Scarlete, J. He, J. F. Harrod & I. S. Butler

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  1. M. Scarlete
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  2. J. He
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  3. J. F. Harrod
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Editors and Affiliations

  1. Department of Chemistry, McGill University, Montreal, Quebec, Canada

    John F. Harrod

  2. Materials Science & Engineering, College of Engineering, Ann Arbor, Michigan, USA

    Richard M. Laine

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Scarlete, M., He, J., Harrod, J.F., Butler, I.S. (1995). Poly(Methylsilane) And Poly(Hydrazinomethylsilane) as Precursors for Silicon-Containing Ceramics. In: Harrod, J.F., Laine, R.M. (eds) Applications of Organometallic Chemistry in the Preparation and Processing of Advanced Materials. NATO ASI Series, vol 297. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0337-4_7

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  • DOI: https://doi.org/10.1007/978-94-011-0337-4_7

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4149-2

  • Online ISBN: 978-94-011-0337-4

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