Skip to main content
SpringerLink
Log in

The Topography of Ion-Bombarded Surfaces

  • Chapter
Materials Modification by High-fluence Ion Beams

Part of the book series: NATO ASI Series ((NSSE,volume 155))

Abstract

The nature of the response of a surface to ion beams is strongly materials dependent. As will become clear here, and can also be determined from other recent reviews of this topic (1 to 4), very few general laws can be applied to the subject as a whole and it therefore does not lend itself to a grand analytical theory. One needs to select well defined areas in order to begin to accurately quantify the effects. The simplest situation one can visualize is that of a monoisotopic, amorphous, conducting solid bombarded with a collimated, spatially and temporarily uniform ion beam. One then chooses to neglect all atom fluxes other than those of the beam and primary (i.e. as a direct result of the incident ion collision cascade) sputtering. Even then iterative numerical methods still have to be used, except in the most trivial cases, to predict the evolution of surface contour with increasing fluence.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 16.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Similar content being viewed by others

References

  1. ‘Ion Bombardment Modification of Surfaces’ editors O. Auciello and R. Kelly, Elsevier (Amsterdam, 1984), particularly chapters 3 (R. Kelly), 5 (G. Carter and M. J. Nobes), 6 (I. H. Wilson, J. Belson and O. Auciello) and 7 (R. S. Robinson and S. M. Rossnagel).

    Google Scholar 

  2. ‘Erosion and Growth of Solids Stimulated by Atom and Ion Beams’ editors G. Kiriakidis, G. Carter and J. L. Whitton, particularly pages 70 (G. Carter), 103 (M. J. Nobes), 121 (R. Smith and M. A. Tagg) and 181 (S. M. Rossnagel).

    Google Scholar 

  3. Carter G. Katardjiev IV, M. J. Nobes and J. L. Whitton: in press.

    Google Scholar 

  4. G. K. Wehner: J. Vac. Sci. Technol A3 (1985) 1821.

    Google Scholar 

  5. W. Beinvogl and U. Wagner: Proc. Int. Symp. on Trends and New Applications in Thin Films, Strasburg (March 1987), published by Societe Francaise du Vide (Paris).

    Google Scholar 

  6. R. M. Feenstra and G. S. Oehrlein: J. Vac. Sci. Technol. B3 (1985) 1136.

    Google Scholar 

  7. J. O. Bovin, R. Wallenberg and D. J. Smith: Nature 317 (5 Sept. 1985). 47.

    Article  CAS  Google Scholar 

  8. A. D. G. Stewart and M. W. Thompson: J. Mat. Sci., 4, (1969) 56.

    Article  Google Scholar 

  9. I. H. Wilson and M. W. Kidd: J. Mat. Sci., 6, (1971) 1362.

    Article  CAS  Google Scholar 

  10. G. Carter, M. J. Nobes and K. I. Arshak: Wear, 53, (1979) 245.

    Article  Google Scholar 

  11. R. Smith and M. Walls: Phil. Mag. A, 42(2), (1980) 245.

    Article  Google Scholar 

  12. D. E. Harrison Jr.,: Rad. Effects, 70, (1983) 1.

    Article  CAS  Google Scholar 

  13. H. H. Andersen and H. L. Bay: ‘Sputtering by particle bombardment 1’, Ed. R. Behrisch, Springer-Verlag, Berlin, (1981), 200.

    Google Scholar 

  14. M. Hou and M. T. Robinson: Appl. Phys., 371, (1978), 17.

    Google Scholar 

  15. L. G. Haggmark and J. P. Biersack: J. Nucl. Materials, 103 & 104, (1981), 345.

    Article  Google Scholar 

  16. M. T. Robinson: J. Appl. Phys., 54(5), (1983), 2650.

    Article  CAS  Google Scholar 

  17. P. D. Townsend, J. C. Kelly and N. E. W. Hartley: ‘Ion Implantation, Sputtering and Their Applications’, Academic Press, London, (1976).

    Google Scholar 

  18. P. Sigmund: Phys. Rev. 184, 383 (1969), See also P. Sigmund in ‘Sputtering by Particle Bombardment I’: Topics in Applied Physics, Vol. 47, R. Berisch (Ed), (Springer-Verlag, 1981).

    Google Scholar 

  19. D. E. Harrison Jr.: Radiation Effects 70, 1, (1983).

    Article  CAS  Google Scholar 

  20. J. B.Sanders: Thesis, Univ. Leiden (195B).

    Google Scholar 

  21. N. E. Roosendaal, U. Littmark and J. B. Sanders: Phys. Rev. B26, 5261 (1982).

    Google Scholar 

  22. I. H. Wilson, S. Chereckdjian and R. Webb: Nucl. Instrum. and Meth. B7/8, 735–741 (1985).

    Google Scholar 

  23. R. P. Webb and I. H. Wilson: paper A 4.2, Spring Meeting of MRS (1985).

    Google Scholar 

  24. R. P. Webb, C. Jeynes and I. H. Wilson: Nucl. Instrum. and Meth. B13, 449–452 (1986).

    CAS  Google Scholar 

  25. I. H. Wilson and R. P. Webb: Radiation Effects 99 (1986) 281–291.

    Article  CAS  Google Scholar 

  26. A. D. G. Stewart and M. W. Thompson: J. Mat. ScTT 4 (1969) 56.

    Article  Google Scholar 

  27. G. B. Whitham: ‘Linear and Non Linear Waves’, Wiley J (New York 1974).

    Google Scholar 

  28. F. C. Frank: ‘Growth and Perfection of Crystals’, (Wiley J, New York) 1958, p.411.

    Google Scholar 

  29. F. C. Frank: Zeits. Phys. Chem. Neue. Folge, 77 (1972) 84.

    Article  CAS  Google Scholar 

  30. J. C. Luke, J. Geophys Res., 77 (1972) 2460.

    Article  Google Scholar 

  31. J. C. Luke: Zeits. Geomorph. Supp., 25 (1976) 114.

    Google Scholar 

  32. D. J. Barber, F. C. Frank, M. Moss, J. W. Steeds and I. S. T. Tsong: J. Mater. Sci. 8 (1973) 1030.

    Article  CAS  Google Scholar 

  33. M. J. WitcomE: J. Mater. Sci. 10 (1975) 669.

    Article  Google Scholar 

  34. D. W. Younger and C. M. Haynes: J. Vac. Sci. Technol. 21 (1982) 677.

    Article  Google Scholar 

  35. I. H. Wilson, S. S. Todorov and D. S. Karpuzov: Nucl. Instrum. and Meth. 209/210 (1983) 549.

    Article  Google Scholar 

  36. J. P. Ducommun, M. Cantagrel and M. Moulin: J. Mater. Sci. 10 (1975) 52.

    Article  CAS  Google Scholar 

  37. T. Marsh R. Collins: Radiat. Eff. 99 (1986) 171.

    Article  CAS  Google Scholar 

  38. M. J. Witcomb: Radiat. Eff. 27 (1975) 223.

    Article  Google Scholar 

  39. J. Lindhard, M. Scharff and H. E. Schiott: Matt. Fys. Medd. Dan. Vid. Selsk. 33 (1963) No. 14.

    Google Scholar 

  40. M. T. Robinson in ‘Sputtering by Particle Bombardment 1’, ed. R. Behrisch, Springer-Verlag, Berlin (1981), p.91.

    Google Scholar 

  41. N. Bibic, I. H. Wilson and T. Nenodovic: J. Appl. Phys. 53 (1982) 5250.

    Article  CAS  Google Scholar 

  42. I. H. Wilson and J. Belson: Phil. Mag. A47 (1983) 351.

    Google Scholar 

  43. I. H. Wilson: Radiat. Eff. 18 (1973) 95.

    Article  Google Scholar 

  44. L. F. Johnson in ref. 1, p.366.

    Google Scholar 

  45. H. W. Lehmann, L. Krausbauer and R. Widmer: J. Vac. Sci. Technol., 14 (1977) 281.

    Article  CAS  Google Scholar 

  46. R. Smith, S. S. Makh and J. M. Walls: Phil. Mag. A47 (1983) 453.

    Google Scholar 

  47. J. Belson and I. H. Wilson: Nucl. Instr. Meth. 182/183 (1981) 275.

    Article  Google Scholar 

  48. W. Hauffe: Proc. 1st Int. Conf. Ion Beam Modification of Materials (Budapest, 1978) p.1079.

    Google Scholar 

  49. O. Auciello and R. Kelly: Rad. Effects, 66 (1982) 195.

    Article  CAS  Google Scholar 

  50. R. Shuttleworth: Proc. Phys. Soc. A 63 (1550) 44.

    Google Scholar 

  51. F. D. Rosi: Trans. A. I. M. E., 200 (1954) 1009.

    Google Scholar 

  52. J. Belson and I. H. Wilson: Physics Letters, 90A (1982) 141.

    CAS  Google Scholar 

  53. C. Herring: ‘Structure and properties of solid surfaces’ eds. R. Gomer and C. Smith.

    Google Scholar 

  54. C. Herring: Phys. Rev., 82 (1951) 87.

    Article  CAS  Google Scholar 

  55. M. Von Laue; Z. Kristallogr, 105 (1943) 124.

    Google Scholar 

  56. W. K. Burton, N. Cabrera and F. C. Frank: Phil. Trans. A., 243 (1951) 40.

    Article  Google Scholar 

  57. W. W. Mullins: J. Appl. Phys., 28 (1957) 333.

    Article  CAS  Google Scholar 

  58. G. Carter, J. S. Colligon and M. J. Nobes: Rad. Effects, 31. (1977) 65.

    Article  Google Scholar 

  59. L. T. Chadderton: Rad. Effects Lett., 50 (1979) 23.

    Article  Google Scholar 

  60. M. Drechsler, J. J. Metois and J. C. Heyraud: Surf. Sci., 108 (1981) 549.

    Article  CAS  Google Scholar 

  61. I. H. Wilson (unpublished).

    Google Scholar 

  62. D. J. Elliott and P. D. Townsend: Phil. Mag. 23 (1971) 249.

    Article  CAS  Google Scholar 

  63. Ph. J. J. Elich, H. E. Roosendaal, and D. OnderBelinden: Radiat. Eff. 14 (1972) 93.

    Article  CAS  Google Scholar 

  64. H. E. Roosendaal: ‘Sputtering by Particle Bombardment 1’, ed. R. Behrisch, Springer-Verlag (Berlin, 1981) p.249.

    Google Scholar 

  65. J. E. Westmoreland and P. Sigmund: Rad. Eff., 6 (1971) 187.

    Article  Google Scholar 

  66. P. Sigmund: J. Mater. Sci., 8 (1973) 1545.

    Article  CAS  Google Scholar 

  67. W. Jager and K. L. Merkle: 9th Int. Congress on Electron Microscopy, Toronto, 1 (1978).

    Google Scholar 

  68. I. H. Wilson: J. Appl. Phys., 53 (1982) 1698.

    Article  CAS  Google Scholar 

  69. J. A. Kubby and B. M. Siegel: Nucl. Instrum. and Meth. B13 (1986) 319.

    Article  Google Scholar 

  70. R. L. Cunningham, P. Haymann, C. Lecomte, W. J. Moore and J. J. Trillat: Appl. Phys. 31 (1960) 839.

    Article  CAS  Google Scholar 

  71. M. J. Nobes, G. W. Lewis, G. Carter and J. L. Whitton: Nucl. Instrum. and Meth., 170 (1980) 363.

    Article  Google Scholar 

  72. W. Begemann, S. Kostic, J. J. Nobes, G. W. Lewis and G. Carter: Rad. Effects Lett. 87 (1986) 229.

    Article  CAS  Google Scholar 

  73. R. Kelly and O. Auciello: Surface Science, 100 (1980) 135.

    Article  CAS  Google Scholar 

  74. O. Wada: J. Phys. D., 17 (1984) 2429.

    Article  CAS  Google Scholar 

  75. J. A. Floro, S. M. Rossnagel and R. S. Robinson: Radiat. Effects lett. 68 (1982) 57.

    Article  CAS  Google Scholar 

  76. G. W. Lewis, J. S. Colligon and M. J. Nobes: J. Mater. Sci., 15 (1980) 681.

    Article  CAS  Google Scholar 

  77. R. S. Gvosdover, V. M. Efremenkova, L. B. Shelyakin and V. E. Yurasova: Radiat. Effects, 27 (1976) 237.

    Article  CAS  Google Scholar 

  78. Y. Horoma: J. Vac. Sci. Technol: A5 (1987) 321.

    Google Scholar 

  79. R. S. Robinson and S. M. Rossnagal: J. Vac. Sci. Technol., A1 (1983) 1398.

    Google Scholar 

  80. J. S. Vermaak and J. Petruzello: J. Appl. Phys. 55 (1984) 1215.

    Article  CAS  Google Scholar 

  81. R. S. Nelson, D. J. Mazey and J. A. Hudson: Proc. Brit. Nuclear Energy Soc. European Conf. on voids, Reading UK, eds. S. F. Pugh, M. H. Loretto and D. I. R. Norris (1971).

    Google Scholar 

  82. S. K. Das, M. Kaminsky and G. Fenske: J. Nucl. Mater. 76/77 (1978) 215, 247 and 256.

    Article  Google Scholar 

  83. U. Bangert, P. J. Goodhew, C. Jeynes and I. H. Wilson: J. Phys. D. 19 (1986) 589.

    Article  CAS  Google Scholar 

  84. I. H. Wilson and I. S. T. Tsong in preparation.s with increasing fluence.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electronic and Electrical Engineering, University of Surrey, GU2 5XH, Surrey, Guildford, England

    Ian H. Wilson

Authors
  1. Ian H. Wilson
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. IBM T.J. Watson Research Center, Yorktown Heights, NY, USA

    Roger Kelly

  2. Laboratório Nacional de Engenharia e Tecnologia Industrial, Sacavem, Portugal

    M. Fernanda da Silva

Rights and permissions

Reprints and permissions

Copyright information

© 1989 Kluwer Academic Publishers

About this chapter

Cite this chapter

Wilson, I.H. (1989). The Topography of Ion-Bombarded Surfaces. In: Kelly, R., da Silva, M.F. (eds) Materials Modification by High-fluence Ion Beams. NATO ASI Series, vol 155. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1267-0_29

Download citation

  • DOI: https://doi.org/10.1007/978-94-009-1267-0_29

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7063-8

  • Online ISBN: 978-94-009-1267-0

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation