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Ion Implantation Techniques pp 122–156Cite as

The Stopping and Range of Ions in Solids

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Part of the book series: Springer Series in Electrophysics ((SSEP,volume 10))

Abstract

The stopping and range of ions in matter is physically very complex, and there are few simple approximations which are accurate. However, if modern calculations are performed, the ion distributions can be calculated with good accuracy, typically better than 10%. This review will be in several sections:

  1. a)

    A brief exposition of what can be determined by modern calculations.

  2. b)

    A review of existing widely-cited tables of ion stopping and ranges.

  3. c)

    A review of the calculation of accurate ion stopping powers.

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Author information

Authors and Affiliations

  1. Hahn-Meitner-Institut, Glienicker-Strasse 100, D-1000, Berlin 39, Fed. Rep. of Germany

    J. P. Biersack

  2. IBM-Research, Yorktown Heights, NY, 10598, USA

    J. F. Ziegler

Authors
  1. J. P. Biersack
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  2. J. F. Ziegler
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Editor information

Editors and Affiliations

  1. Frauenhofer — Institut für Festkörpertechnologie, Paul-Gerhardt-Allee 42, D-8000, München 60, Fed. Rep. of Germany

    Heiner Ryssel

  2. Siemens AG, Balanstraße 73, D-8000, München 80, Fed. Rep. of Germany

    Hans Glawischnig

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© 1982 Springer-Verlag Berlin Heidelberg

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Biersack, J.P., Ziegler, J.F. (1982). The Stopping and Range of Ions in Solids. In: Ryssel, H., Glawischnig, H. (eds) Ion Implantation Techniques. Springer Series in Electrophysics, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-68779-2_5

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  • DOI: https://doi.org/10.1007/978-3-642-68779-2_5

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-68781-5

  • Online ISBN: 978-3-642-68779-2

  • eBook Packages: Springer Book Archive

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