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Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons

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Book cover Novel Optical Technologies for Nanofabrication

Part of the book series: Nanostructure Science and Technology ((NST))

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Abstract

Surface plasmonic polaritons (SPPs)-based photo-nanolithography is a recently developed photolithography technology, capable of making breaking diffraction-limit deep-subwavelength patterns with compatible infrastructure instrumentations, materials, and processing with those used in the conventional photolithography technology. The physics origin of the superior capability of the SPPs-based photolithography is based on the unique properties of “optical frequency, but X-ray wavelength” of the surface evanescent waves induced at the interface of a metal and a dielectric material. This chapter reviews progress of different major implementation schemes of the SPPs-based photolithography in recent years, which include categories of prism-coupled SPPs nanolithography, grating-coupled SPPs nanolithography, superlens imaging nanolithography, SPPs direct writing nanolithography, and so on. The SPPs-based photolithography is currently a fast-growing research area in which new ideas and improvements about the technology continue to emerge. It is believed that it will have significant potential in the next-generation photolithography technology of nano features, large area, fast speed, and cost-effective.

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Authors and Affiliations

  1. National Center for Nanoscience and Technology, Beijing, China, People’s Republic

    Qian Liu

  2. Technical Institute of Physics and Chemistry Chinese Academy of Sciences, Beijing, China, People’s Republic

    Xuanming Duan

  3. Institute of Information Optical Engineering, Soochow University, Suzhou, China, People’s Republic

    Changsi Peng

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  1. Qian Liu
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  2. Xuanming Duan
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  3. Changsi Peng
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Liu, Q., Duan, X., Peng, C. (2014). Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons. In: Novel Optical Technologies for Nanofabrication. Nanostructure Science and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40387-3_6

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