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Electron Spectroscopic Imaging

  • Chapter
Energy-Filtering Transmission Electron Microscopy

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 71))

Abstract

Whereas an image in a conventional transmission electron microscope (CTEM) contains contributions from elastically and inelastically scattered electrons that pass the objective diaphragm, the electron spectroscopic imaging (ESI) mode of an EFTEM allows us to separate the contributions by inserting an energy-selecting slit in the energy-dispersive plane of a filter lens or a prism spectrometer; energy-loss windows E ± δ/2 with a width δ= 1 - 20 eV can be selected (see Sect. 1.4.2). The choice between zero-loss filtering and the use of an energy-loss window in the loss-spectrum of inelastically scattered electrons depends on the specimen and the information wanted. A schematical energy-loss spectrum in Fig. 7.1 shall demonstrate the ESI modes [7.1–5] which are discussed in detail in this Chapter.

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  1. Ludwig Reimer
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  1. Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149, Münster, Germany

    Ludwig Reimer

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© 1995 Springer-Verlag Berlin Heidelberg

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Reimer, L. (1995). Electron Spectroscopic Imaging. In: Reimer, L. (eds) Energy-Filtering Transmission Electron Microscopy. Springer Series in Optical Sciences, vol 71. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48995-5_7

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  • DOI: https://doi.org/10.1007/978-3-540-48995-5_7

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