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Practical Materials Characterization pp 93–132Cite as

X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES)

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Abstract

X-ray photoelectron spectroscopy (XPS), also known as electron spectroscopy for chemical analysis (ESCA), and Auger electron spectroscopy (AES) are widely used materials characterization techniques belonging to the general class of methods referred to as surface analysis. These non-destructive techniques provide, to varying degrees, semi-quantitative elemental, chemical-state and electronic-structure information from the top 10 nm of a material and are sensitive to elements Li and above. XPS and Auger have both found applications over a vast range of material classes; such as metallic, ceramic, polymeric, and composite; and technologies such as microelectronics, solar energy, and nanotechnology. Modern spectrometers are now not only capable of achieving high-energy resolution spectroscopy, but are also capable of 2-dimensional imaging.

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Authors and Affiliations

  1. Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801, USA

    Richard T. Haasch

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  1. Richard T. Haasch
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Correspondence to Richard T. Haasch .

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  1. University of Illinois-Urbana Champaign, Urbana, Illinois, USA

    Mauro Sardela

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Haasch, R.T. (2014). X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES). In: Sardela, M. (eds) Practical Materials Characterization. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-9281-8_3

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