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Microfabrication, Microstructures and Microsystems

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Book cover Microsystem Technology in Chemistry and Life Science

Part of the book series: Topics in Current Chemistry ((4143,volume 194))

Abstract

This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft lithography represents a set of non-photolithographic techniques: it forms micropatterns of self-assembled monolayers (SAMs) by contact printing and generates microstructures of polymers by contact molding. The aim of this paper is to illustrate how non-traditional materials and methods for fabrication can yield simple, cost-effective routes to microsystems, and now they can expand the capabilities of these systems.

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Authors and Affiliations

  1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA, 02138, USA

    Dong Qin, Younan Xia, John A. Rogers, Rebecca J. Jackman, Xiao-Mei Zhao & George M. Whitesides

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  1. Dong Qin
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  2. Younan Xia
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Editors and Affiliations

  1. Department of Chemistry Imperial College of Science and Technology, Zeneca/Smithkline Beecham Centre for Analytical Sciences, South Kensington London, SW7 2AY

    Andreas Manz  & Holger Becker  & 

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Qin, D., Xia, Y., Rogers, J.A., Jackman, R.J., Zhao, XM., Whitesides, G.M. (1998). Microfabrication, Microstructures and Microsystems. In: Manz, A., Becker, H. (eds) Microsystem Technology in Chemistry and Life Science. Topics in Current Chemistry, vol 194. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-69544-3_1

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