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Klein-Wiele, JH., Bekesi, J., Ihlemann, J., Simon, P. (2005). Nano-Structuring with Femtosecond Excimer Laser Pulses. In: Basting, D., Marowsky, G. (eds) Excimer Laser Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26667-4_19
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